电子束泵浦氩中高能电子分布的理论计算
Theoretic calculation on high energy electron distribution in argon pumped by electron beam
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摘要: 改进了文献中报导的Boltzmann基本方程。与Boltzmann基本方程相比，改进后的Boltzmann方程更全面地描述了电子与基态氩原子碰撞的物理过程，并能计算出整个能量区间的电子分布。利用Boltzmann基本方程和改进的Boltzmann方程，对电子束泵浦氩中能量大于氩原子第一激发态能量(11.56eV)的高能电子分布函数进行了理论计算。计算中，选取了电子碰撞氩的微分电离截面和激发截面的解析表达式。对计算所得的稳态电子分布函数以及达到稳态分布所需的特征时间进行了分析和讨论。
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关键词:
- Boltzmann方程 /
- 电子束 /
- 电子分布函数
Abstract: The basic Boltzmann equation in reference is improved. Compared with the basic equation, the improved Boltzmann equation can describe the collision between electron and fundamental state argon more perfectly, and can calculate the electron distribution in the whole energy range. With the basic Boltzmann equation and the improved Boltzmann equation, the high energy electron distributions, whose energy is larger than the first excited state energy (11.56eV), are calculated in argons pumped by electron beam. The analytic formulas on differential ionization cross sections and excitation cross sections are selected for calculation. The calculated results, which include the stationary electron distribution and characteristic time for beams to reach the stationary distributions, are analyzed and-
Key words:
- boltzmann equation /
- electron beam /
- electron distribution function
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