高气压微波氢等离子体发射光谱诊断
Diagnosis of high-pressure microwave-induced hydrogen plasma using atomic emission spectroscopy
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摘要: 在2.45 GHz，800 W级的高气压微波等离子体放电系统中，通过测量不同微波功率和放电气压下氢等离子体的Balmer线系的发射光谱，从测量的谱线总展宽中卷积去掉具有高斯线形的Doppler展宽和仪器展宽得到谱线的Stark展宽，并通过Stark展宽测量氢等离子体的电子数密度和电场强度。结果表明：等离子体的电子数密度和电场强度随着放电气压的升高都是先增大后减小，随着微波功率的增加呈现逐渐增大的趋势。微波功率为800 W时，气压在25 kPa时电子数密度和电场强度都达到最大值，等离子体的电子数密度和内部的电场强度分别为3.55×1012 cm-3及4.01 kV/cm。Abstract: The H Balmer emission lines have been measured on a high-pressure microwave plasma apparatus with pure hydrogen at 2.45 GHz. The broadening caused by Stark effect was obtained by separating (deconvolution) the Doppler broadening and instrumental broadening, which were supposed to be Gaussian profiles, from the total broadened profile. The electron density and the electric field were simultaneously obtained by the derived Stark broadening of spectral lines. The results indicate that both the electron density and the electric field strength increase with the increase of microwave power, and they increase initially and then decrease with the increase of the pressure. Their peaks are respectively 3.55×12 cm-3 and 4.01 kV/cm at the gas pressure of 25 kPa when the microwa
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