用于高功率激光装置的压电步进驱动器
Piezoelectric stepper actuator in high power laser facility
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摘要: 根据神光Ⅱ高功率激光装置的具体工程需求，设计了一种以层叠式压电陶瓷为驱动元件的新型压电步进驱动器。驱动器利用杠杆机构实现箝位机构和进给机构交替箝位动子，通过对压电陶瓷小步距的位移连续累加的步进方式，实现大行程直线位移；具有控制简单、行程大、分辨力高及断电箝位的特点。样机试验结果表明，驱动器的运动分辨力达到nm级，步距分辨力达到50 nm，行程21 mm。Abstract: According to the requirements of the Shenguang Ⅱ high power laser facility, a novel piezoelectric stepper actuator was designed using piezoelectric stack as actuator element. Utilizing lever mechanism, the moving part is clamped alternatively by clamp mechanism and feed mechanism, and large stroke is created by accumulating the relatively small displacements produced by piezoelectric elements. The characteristics of the system are simple control, large stroke, high resolution and power-off hold. The experiment of the prototype shows that, the actuator has a resolution of 50 nm, travel of 21 mm．
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