软X光谱学光子筛衍射特性的实验表征

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Measurement of diffraction properties of photon sieves applied to spectroscopy for soft X-ray

1.
CAS Key Laboratory of Basic Plasma Physics,Department of Modern Physics,University of Science and Technology of China,Hefei 230026,China;
2.
National Key Laboratory for Laser Fusion,Research Center of Laser Fusion,CAEP,P.O.Box 919-986,Mianyang 621900,China;
3.
Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

摘要: 概述了谱学光子筛的设计原理，计算了其透射率，并对设计的软X光谱学光子筛的衍射模式在光学波段进行了模拟计算和实验表征。结果表明，这种新型色散元件具有良好的、与设计预期一致的单级衍射特性，3级及以上的高级衍射能被有效抑制。与传统的透射光栅和以前设计的单级衍射光栅相比，新设计的软X光谱学光子筛更易于实现自支撑，可望在极紫外和软X光谱测量过程中得到广泛应用。
- 软X光 /
- 光子筛 /
- 衍射光栅 /
- 衍射特性
Abstract: The principle of a photon sieve applied to soft X-ray spectroscopy is introduced, and the transmittance of the photon sieve is calculated. The diffraction pattern of the photon sieve is simulated and measured in visible light wave band. It is shown that the dispersive component has good single order diffraction properties, i.e. the third order and higher order diffraction can be suppressed effectively. The photon sieve applied to soft X-ray spectroscopy can realize self-sustaining easily compared with the conventional transmission grating and single-order diffraction grating designed before, and it might be employed widely for X-ray and extreme ultraviolet spectroscopic diagnoses.
- soft x-ray /
- photon sieves /
- diffraction grating /
- diffraction properties

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