等离子体诊断用18.2 nm Schwarzschild显微镜
18.2 nm Schwarzschild microscope for plasma diagnosis
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摘要: 研制了用于超快激光等离子体诊断的Schwarzschild型正入射显微镜，该显微镜工作波长为18.2 nm，数值孔径为0.1，放大倍数为10。根据诊断要求设计了Schwarzschild物镜的光学结构，计算了物镜的光学传递函数，结果显示,设计的物镜在±1 mm视场范围内像方空间分辨力可达125 lp/mm。根据系统工作波长和光线在镜面的入射角度设计了Mo/Si周期多层膜反射镜，制作了Schwarzschild显微镜光学元件，镀制的膜系周期厚度为9.509 nm，周期数为30，对18.2 nm波长的反射率约31.1%。利用激光等离子体光源对24 lp/mm网格进行了成像实验，实验结果表明:系统在中心视场的分辨力为3 μm，600 μm内视场的分辨力为5 μm。
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关键词:
- Schwarzschild显微镜 /
- 激光等离子体 /
- Mo/Si多层膜 /
- 空间分辨力
Abstract: A Schwarzschild microscope at 18.2 nm for ultra-fast laser produced plasma diagnosis is developed. According to the requirements of plasma diagnosis, the microscope is designed for numerical aperture of 0.1 and magnification of 10. It is found that spatial resolution of the designed objective achieves 1 250 lp/mm within the field of ±1 mm with respect to the calculation of modular transfer function. Based on the working wavelength and incidence angle of light, the Mo/Si multilayer film with period of 9.509 nm and layer number of 30 is designed and the coatings are deposited with magnetron sputtering. The reflectivity of the developed optical elements at 18.2 nm is about 30%. In order to demonstrate the resolution of microscope, a 24 lp/mm copper grid backlit by laser produced plasma is im-
Key words:
- schwarzschild microscope /
- laser produced plasma /
- mo/si multilayers /
- spatial resolution
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