基于子孔径拼接原理检测大口径光学元件
Large aperture optical components test based on sub-aperture stitching
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摘要: 为了实现小口径干涉仪对大口径光学元件的低成本、高分辨力检测，可采用子孔径拼接方法。在对拼接算法进行改进的基础上，开发了拼接检测软件;建立了一套拼接检测系统，开展了大口径平面光学元件的子孔径拼接检测实验研究。利用9个60 mm×60 mm子孔径拼接来检测120 mm×120 mm的光学元件，检测结果表明:峰谷值误差为2.37%，均方根值误差仅为0.27%。Abstract: Sub-aperture stitching can be used to measure large aperture optical components with low cost and high resolution by a small aperture interferometer. A program based on the improved sub-aperture stitching algorithm was compiled, and the platform for sub-aperture stitching test was established. The experimental stitching that tested a 120 mm×120 mm optical component by nine 60 mm×60 mm planar sub-apertures was performed. The peak-valley error of test was 2.37% and the root-mean-square error was only 0.27%.
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