碳气凝胶/聚苯乙烯双介质柱状靶的研制
Fabrication of dual-media CRF/CH cylindrical target
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摘要: 介绍了碳气凝胶/聚苯乙烯（CRF/CH）双介质柱状靶的制备方法。使用溶胶-凝胶法和微模具原位成型法制备了直径为820 μm的间苯二酚-甲醛（RF）气凝胶微柱，在氮气保护下进行高温碳化后得到直径为730 μm、密度为250 mg·cm-3的CRF微柱；采用浸渍提拉法在CRF微柱柱面镀制一层厚度为26 μm 的CH薄膜， 形成CRF/CH双介质结构；采用机械微切割技术制备了长度为1 mm， 内径为730 μm，壁厚为26 μm的CRF/CH双介质柱状靶。实验研究了RF,CRF气凝胶微柱的制备工艺、微观形貌及CRF微柱轴向和径向的密度均匀性，探讨了影响CH薄膜厚度的主要因素，并对CH薄膜的表面形貌和两种材料之间的界面进行了表征。Abstract: The fabrication procedures of dual-layer cylindrical carbonized resorcinol formaldehyde (CRF) aerogel/polystyrene (CH) target were investigated. The organic cylindrical RF aerogel was synthesized by using sol-gel process and micro-shaped method, the cylindrical CRF aerogel was prepared by pyrolyzing the cylindrical RF aerogel under the protection of nitrogen. The density and diameter of cylindrical CRF aerogel were about 250 mg·cm-3 and 730 μm. The dual-media CRF/CH target with the length of about 1 mm and inner diameter of 730 μm was formed by using dip-coating and micro-cutting process. The preparation process of cylindrical RF and CRF aerogel was discussed. The scanning electron microscope (SEM) was used to measure the microstructure of cylindrical RF and CRF aerogel and the interfac
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