Abstract: Image relay and angular multiplexing, which should be considered together in the design of high power excimer laser system, is reviewed. It’s important to select proper illumination setup and laser beam shaping techniques. Given the complex and special angular multiplexing scheme in high power excimer laser systems, some detailed conceptual layout schemes are given in the paper. After a brief description of lens array and reflective telescope objective, which combine the incoming beams to a common focus, a new schematic layout which uses the final targeting optics and one optical delay line array, to realize multiplexing and de-multiplexing simultaneously is first proposed in the paper.