多层介质膜光栅激光预处理
Laser-conditioning on multilayer dielectric gratings
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摘要: 在N-on-1测试模式下研究了多层介质膜光栅的激光预处理效应。实验发现，激光预处理之后多层介质光栅膜的阈值能提高到处理前阈值的1.5~2.0倍。预处理机制可能是低能量密度激光辐照减少了光栅表面的污染物并降低了光栅表面的粗糙度。激光预处理可以作为优化光栅结构、酸洗等一系列提高多层介质膜光栅阈值方法的一个补充。Abstract: Laser-conditioning on multilayer dielectric gratings(MDGs) is investigated with the standard N-on-1 test method. It is found that the laser induced damage threshold(LIDT) of MDGs is increased up to 2.0 times the value without laser-conditioning. The possible physical mechanism can be explained by the reduction of contamination and surface roughness in the grating region under the irradiation of laser with low energy. In addition to the existing methods such as grating structure optimization and acid-cleaning, laser-conditioning could be an alternative way to improve the LIDT of MDGs.
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