基于评价函数的极紫外多层膜反射式起偏器和检偏器设计
Design of reflective multilayer polarizers in extreme ultraviolet range using different merit functions
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摘要: 基于三种不同评价函数,利用全局优化算法设计了极紫外波段高性能反射式多层膜偏振元件。通过比对不同评价函数的设计结果，分析了评价函数、工作角度及膜层数对反射式多层膜偏振片性能的影响，确定了极紫外多层膜反射式偏振片设计的角度选择、膜层数选择及评价函数选择标准。为解决传统的单一性能优化造成的偏振度损失的问题，构造了偏振比对数结合反射率的评价函数，该方法设计的偏振元件性能优于传统优化方法设计的结果。Abstract: A new method of designing reflective multilayer polarizers working in extreme ultraviolet (EUV) range at a single wavelength using different merit functions has been developed. A merit function of product of s-reflection throughput and logarithm of reflection polarization ratio was chosen. Characteristics of Mo/Si multilayers calculated using the merit function at 13.0 nm have been compared with those calculated using the traditional method. The polarizers of high polarization ratio and large s-reflectivity can be designed by choosing the number of layers and optimizing the thickness of each layer to maximize the merit function.
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Key words:
- multilayer /
- polarizer /
- reflection /
- extreme ultraviolet /
- merit function
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