压电薄膜变形镜响应函数计算及参数优化

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Response function calculation and parameter optimization of piezoelectric film deformable mirror

1.
Research Center of Laser Fusion,CAEP,P.O.Box 919-918,Mianyang 621900,China;
2.
Graduate School of China Academy of Engineering Physics,Mianyang 621900,China;
3.
Department of Engineering Physics,Tsinghua University,Beijing 100084,China

摘要: 针对方口径压电薄膜变形镜，采用傅里叶级数法推导了其机电行为的数学解析式。并利用该表达式对该类变形镜的交联值、使用口径等性能指标进行了研究。结果表明：交联值随电极尺寸呈线性变化关系，在可用范围内保持在0.6以上，压电薄膜变形镜大的交联值保证了其对低阶像差强的校正能力；变形镜的校正能力与通光口径密切相关，其最佳使用口径比约为0.8。
- 自适应光学 /
- 压电薄膜变形镜 /
- 响应函数 /
- 交联值 /
- 使用口径
Abstract: The response function of square-aperture piezoelectric film deformable mirror is calculated using Fourier series method. Then the optimization of some parameters such as correlation coefficient and beam aperture is done by numerical simulation. The results show that, correlation coefficient is linear with the side-length of electrode and remains above 0.6 for beam aperture of 100 mm×100 mm with 4 to 14 electrodes of 5 to 25 mm side-length in each row, ensuring the mirror’s strong ability to correcting low-order aberrations. Beam aperture ratio is also an important parameter affecting the mirror’s aberration correction ability, and its optimal value is simulated to be 0.8 in our conditions.
- adaptive optics /
- piezoelectric film deformable mirror /
- response function /
- correlation coefficient /
- beam aperture

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