Abstract: The design method for measuring current and voltage of compact X-pinch pulsed power device according to the coaxial cylindrical structure of pulse transmission line (PTL) on X-pinch compact pulsed power source, a stainless steel film connecting the outer tube and load was designed as pulsed current monitor. A capacitive voltage divider was designed in the end of the PTL as pulsed voltage monitor. A circuit simulation software was used to simulate the process. The capacitive load voltage probe and the load current probe were calibrated online. The experimental results show that the probes are stable, corresponding to fast, which are ideal tools for measuring load current and voltage.