高精度2×2阵列拼接光栅结构设计
Structure design of high accuracy 2×2 array grating
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摘要: 提出了一种大口径高精度2×2阵列光栅拼接结构，采用模块化和框架式结构设计，保证拼接结构的稳定性；设计了差动螺纹微调组件与压电驱动器相结合的微纳调整组件结构，实现拼接光栅微纳量级的调整要求；讨论了关键组件的设计和制造问题。设计制造的2×2阵列光栅实验样机的最大相对共面误差为17 μm，微纳调整组件的最小调整精度可以达到1.8 nm，分辨力为0.9 nm，初步光路实验表明，设计的拼接调整机构可以快速实时地调整2×2阵列光栅达到要求的精度，且稳定时间大于1 h。Abstract: A new type high accuracy 2×2 array diffraction grating structure is proposed, which has good structure stability in design method of modularization and frame structure. Designed micro-nano adjusting unit consists of differential thread and piezoelectricity driver, that realize micro-nano adjustment request of tiled-grating. Design and manufacture questions about essential parts is discussed. Preliminary test of experiment prototype indicates that the coplanar maximum relative error is 17 μm, minimum adjustment precision of micro-nano adjusting unit is possible to achieve 1.8 nm, and the resolution is 0.9 nm. The optical path experiment indicates that tiling adjusting mechanism may fast and real-time adjust 2×2 array diffraction grating to meet requirements, and stable work time is large
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Key words:
- tiled-grating /
- micro-nano adjusting unit /
- structural design /
- fast ignition
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