基于空间相干性控制的环形光源技术
Ring source technology based on spatial coherence control
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摘要: 提出了一种利用二元相位光栅产生环形光源的新方法,并且可以实现环形光源的环半径和环厚度连续或固定可调。阐述了环形光源抑制相干噪声的原理,推导了环形光源半径及干涉腔长度与条纹对比度之间的关系。实验表明:环形光源能保持干涉条纹对比度,同时有效抑制相干噪声,环形光源模式系统的本征噪声峰谷值小于点光源模式,且没有明显牛顿环噪声,测量重复性和测量精度都高于点光源模式,从而提高了测量精度。Abstract: A new method of generating ring source by binary grating is described, and the radius and thickness of the source ring can be changed dynamically in either continuous or stepwise fashion. The reason for which the ring source can reduce the coherent noise is given. The relation of the ring sources radius and cavity length with interferogram contrast is deduced. Comparative experiments with the traditional point source show that, the ring source can suppress coherent noises effectively and preserve the fringe contrast. The system intrinsic noise in ring source pattern is less than that in point source one and there is no Newton ring in the phase map in evidence. The improvement of measurement accuracy and repeatability can be achieved with ring source.
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Key words:
- ring source /
- coherent noise /
- binary grating /
- measurement repeatability
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