大口径光学元件波前调制PSD模拟分析
Analysis on wavefront modulation by PSD
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摘要: 使用PSD作为大口径光学元件表面加工质量的评价参数,针对不同的波前调制进行了初步的模拟计算,得到了不同调制频率和不同调制深度情况下的PSD曲线变化情况。当调制频率不同时,PSD曲线的突变部分会发生相应的频移,调制频率高则突变发生在空间频率较高的频段,同时PSD峰值不变。相对应调制深度不同时,PSD曲线的突变部份峰值发生变化,调制深度大则峰值大,与此同时峰值出现的位置不会发生变化。计算和分析结果表明PSD分析结果能够在频率域反应出元件表面受到的不同程度的调制信息。Abstract: The power spectral density(PSD) has been employed as the specifying parameter of the optical components with large aperture in the testing process. According to the different wavefront modulation with different depth or frequency, the PSD curves present different variation rule. The change of the modulation frequency will change the corresponding frequency value of the protuberant part on the PSD curve, and at the same time the peak value of the protuberant part is changed. The modulation depth is focused on the intensity change of the protuberant part of the PSD curves.It cannot influence the frequency value of the protuberant part.
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Key words:
- power spectral density /
- wavefront modulation /
- modulation depth /
- modulation frequency
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