适用于ICF靶夹持的多用微夹持器
Multi-purpose microgripper for ICF targets
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摘要: 针对惯性约束聚变靶零件的特点和靶装配应用环境，研制了一种多用微夹持器。该微夹持器以压电陶瓷驱动柔性钳体，集成张合量和夹持力控制功能，可更换各种形状夹口和调整夹口初始开口距离，以适应多种靶零件的夹持。利用有限元分析方法对钳体柔性机构进行了优化设计。通过检测钳体张合时不同部位柔性铰链的应变量，实现了张合量和夹持力的独立控制，并对张合量和夹持力进行了精确标定。实验结果表明：微夹持器张合量达到1 320 m，其控制分辨力为5 m；夹持力为365.0 mN，其控制分辨力1.3 mN。Abstract: A multi-purpose microgripper for ICF targets has been developed based on the characteristic of ICF targets and target-assembly. The microgripper, whose fingers can be changed for different ICF targets, works with flexure hinge and piezoceramics actuator. The flexure hinges of the microgripper are designed and optimized based on the finite element analysis, and the best simulation results are presented. By measuring the strains of the different flexure hinges, the displacement and holding force of the microgripper can be detected independently and they are calibrated precisely. The displacement reaches 1 320 m and its detection resolution is 5 m. The holding force is 365.0 mN and its detection resolution is 1.3 mN.
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Key words:
- microgripper /
- flexure hinge /
- micro-force detection /
- finite element analysis /
- icf target
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