子孔径拼接干涉检测中去倾斜处理技术
Ａnti-tilting technology of the sub-aperture stitching interferograms
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摘要: 倾斜放置对大口径光学元件的检测有很大影响，为了防止在子孔径拼接干涉检测中倾斜所导致的数据丢失等严重后果，并且实现不同次检测的结果可以相互比较，提出了一种软件修正倾斜量的方法。通过对读出的图形数据进行反向倾斜来降低检测中的元件倾斜程度，避免了实际检测过程中手工操作无法达到极小角度修正的困难。通过实验，验证了该方法的可行性和有效性，实现了大口径光学元件正确的子孔径拼接检测，完成了多次检测结果之间的相互比较，结果表明，残差平均值仅为0.12λ（λ=633nm)。Abstract: In the test process of the large aperture components the influence of the tilting of the components is very serious. Specially, in the sub-aperture stitching process the tilting of the components may cause the missing of the data. This paper introduces the anti-tilting technology, which tilts the interferogram on the opposite direction of the components' tilting. To avoid the difficulty of manual operation, the computer optimization method has been employed. Experiments have been done to verify the feasibility and the validity of this technique. After the anti-titling the right stitching result can be gotten and it is possible to compare different test results with one test system. And the mean of the residual errors of the compare is only ０．１２λ (λ equals to 633nm).
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Key words:
- sub-aperture stitching /
- anti-tilting /
- optical test /
- residual error
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