深紫外和频晶体CLBO产生193 nm激光的频率变换
Frequency conversion of generating 193 nm laser by deep ultraviolet sum-frequency crystal CLBO
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摘要: 简述了深紫外和频晶体CLBO的光学特性。根据相位匹配角公式、非线性有效系数公式、走离角公式和允许角公式，详细计算了CLBO晶体和频产生193 nm激光时的相位匹配角、非线性有效系数、和频时谐波走离角、允许角的具体数值。根据这些数值，并考虑产业化的要求，对目前几种和频方式进行了比较，最终选定波长为λ1=2 100 nm的o光和波长为λ2=213 nm的e光作为基频光进行和频的匹配方式。此方式相位匹配角为51.6°，具有大的非线性有效系数0.97，小的走离角3.7°，大的允许角1.9×10-6 rad·mm，是非常理想的产生193 nm激光的匹配方式。Abstract: The properties of nonlinear frequency conversion in a new deep ultraviolet sum-frequency crystal CLBO were discussed. The data for sum-frequency CLBO crystal generating 193 nm laser of phase-matching angle, effective nonlinear coefficient, walk-off angle and maximum acceptance angle were calculated. According to those data and taking account of lasers commercialization requirements, several phase-matching projects were compared. At last, the phase-matching type of 2 100 nm(o)+213 nm(e)→193 nm(e) was selected. The phase-matching type of 2 100 nm(o)+213 nm(e)→193 nm(e) with large effective nonlinear coefficient of 0.97, small walk-off angle 3.7° and big acceptance angle 1.9×10-6 rad·mm was proved to be the optimum for generating 193 nm laser.
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Key words:
- frequency conversion /
- clbo crystal /
- sum-frequency /
- 193 nm laser
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