分布式电极连续面型微变形反射镜力电耦合特性分析
Electro-mechanical coupled analysis of continuous-membrane bulk-micromachined silicon deformable mirror
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摘要: 针对基于MEMS技术制造的连续面型薄膜微变形反射镜，从薄膜理论出发对其力电耦合变形特性进行理论分析，导出了镜面变形表达式。利用该式及响应频率表达式，定量分析了镜面相关尺寸参数对变形量的关系，为变形镜的结构设计提供了可靠的理论依据。结果表明，当镜面厚度为1 μm且与驱动电极间距20 μm时，对控制电压不超过120 V，响应频率大于50 kHz的应用场合，变形镜镜面半径应在2.1～13.8 mm之间进行选择。仿真结果显示，驱动电压较小时，镜面变形与驱动电压平方近似成线性关系。Abstract: Based on a continuous-membrane bulk-micromachined silicon deformable mirror, the paper summarizes the manufacture process of the deformable mirror. Electro-mechanical coupled analysis is presented in detail. Starting from the thin film theory, a universal expression which describes the mirror deflection is finally obtained as well. The relationship between mirror structure parameters and the mirror deflection described by the universal expression can be used to assist in designing mirrors for various applications. The results show that when a 1 μm thick mirror with 20 μm actuator gap is required to work with an actuator voltage less than 120 V and a resonant frequency higher than 50 kHz , the deformable mirror radius should be limited between 21 mm and 13.8 mm. The simulation result re
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