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基于相机阵列的光学组件缺陷在线检测方法

张文学 王继红 任戈

张文学, 王继红, 任戈. 基于相机阵列的光学组件缺陷在线检测方法[J]. 强激光与粒子束, 2020, 32: 051001. doi: 10.11884/HPLPB202032.190444
引用本文: 张文学, 王继红, 任戈. 基于相机阵列的光学组件缺陷在线检测方法[J]. 强激光与粒子束, 2020, 32: 051001. doi: 10.11884/HPLPB202032.190444
Zhang Wenxue, Wang Jihong, Ren Ge. Optical elements defect online detection method based on camera array[J]. High Power Laser and Particle Beams, 2020, 32: 051001. doi: 10.11884/HPLPB202032.190444
Citation: Zhang Wenxue, Wang Jihong, Ren Ge. Optical elements defect online detection method based on camera array[J]. High Power Laser and Particle Beams, 2020, 32: 051001. doi: 10.11884/HPLPB202032.190444

基于相机阵列的光学组件缺陷在线检测方法

doi: 10.11884/HPLPB202032.190444
基金项目: 脉冲功率激光技术国家重点实验室开放基金项目(SKL2018KF05)
详细信息
    作者简介:

    张文学(1995—),男,硕士研究生,从事光学设计和检测技术研究;19950219695@163.com

    通讯作者:

    王继红(1966—),女,研究员,主要从事光束控制技术等方面的研究; wangjihong19@sina.com

  • 中图分类号: TH74

Optical elements defect online detection method based on camera array

  • 摘要:

    利用调焦方式可以实现焦距的连续变化从而对不同物距下的光学组件进行在线检测,但是调焦过程操作复杂且对调焦位移精度要求较高,景深内光学元件缺陷无法区分,难以实现真正意义上的在线检测。因此,本文提出了基于相机阵列的光学组件缺陷在线检测方法。首先建立了相机阵列的成像模型并给出了数字重聚焦表达式以及空间分辨率的表达式。接着利用MATLAB模拟相机阵列成像过程和数字重聚焦过程。最后进行实验验证,通过二维位移台带动相机对不同物距下的多个光学元件表面缺陷进行成像获得阵列相机图像,通过数字重聚焦算法得到不同物距下的光学元件表面缺陷分布信息。实验结果表明,基于相机阵列的光学组件缺陷在线检测技术能够同时对位于景深范围内的光学组件进行在线检测。该方法在光学元件缺陷在线检测方面有着一定的应用价值。

  • 图  1  同一物体在相机阵列中分别成像示意图

    Figure  1.  Schematic diagram of the same object imaging separately in the camera array

    图  2  三个不同物距下的模拟目标

    Figure  2.  Three simulated objects with different object distances

    图  3  5×5相机阵列仿真成像

    Figure  3.  5×5 camera array simulation imaging

    图  4  重聚焦不同物距处的光学元件表面缺陷结果

    Figure  4.  Digital refocusing results of surface defects of optical elements at different object distances

    图  5  光学组件缺陷检测结果示意图

    Figure  5.  Schematic diagram of defect detection results of optical components

    图  6  基于相机阵列的光学组件缺陷检测示意图

    Figure  6.  Schematic diagram of optical components defect detection based on camera array

    图  7  三个目标的数字重聚焦结果

    Figure  7.  Digital refocusing results of the three targets

    图  8  数字重聚焦和离线检测缺陷点外接矩形长宽对比示意图

    Figure  8.  Schematic diagram of length and width comparison of defects’ external rectangle under digital refocusing and off-line detection methods

    表  1  不同数目的相机阵列对于目标3重聚焦图像的像质评价指标

    Table  1.   Image quality evaluation index of different number of camera arrays for target 3

    camera array PSNR MSE
    2×2 36.93 13.26
    3×3 36.90 11.14
    4×4 38.06 10.16
    5×5 38.07 10.03
    6×6 38.42 9.36
    7×7 38.55 9.02
    8×8 38.65 8.85
    下载: 导出CSV
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出版历程
  • 收稿日期:  2019-12-02
  • 修回日期:  2020-02-23
  • 刊出日期:  2020-02-10

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