Metallic glass film used for first mirror surface
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摘要: 为解决大口径非晶金属第一镜实现难题,在研究块体金属玻璃Co61.2B26.2Si7.8Ta4.8材料基础上,采用金属玻璃块体材料制作拼接成溅射靶材,通过非平衡磁控溅射镀膜方法,实现了Co61.2B26.2Si7.8Ta4.8非晶金属薄膜第一镜。研究结果表明:通过成分设计及合成靶材的设计,能够实现与块体金属玻璃具有相同光学特性的非晶薄膜第一镜;通过Cr成分改进,能够进一步提高非晶金属薄膜第一镜在可见光波段的光谱反射率。Abstract: To solve the problem of achieving the large diameter amorphous metallic film first mirrors, based on the research of Co61.2B26.2Si7.8Ta4.8 metallic glass, splicing the amorphous glass bulks together as the target and using bulk amorphous glass as the sputtering material, by unbalanced magnetron sputtering coating method, the Co61.2B26.2Si7.8Ta4.8 amorphous metallic film first mirrors was realized. The research results show that with designing the composition and synthesis target-material, amorphous film first mirrors having the same optical properties with BMGs can be achieved; with coating Cr on the amorphous film, the spectral reflectivity of amorphous metallic film first mirrors in visible spectrum can be further increased.
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Key words:
- first mirror /
- metallic glasses /
- film surface /
- spectral reflectivity
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