Fabrication of microprobe based on NOA73 and SU-8

• Wang Wei^1,2 , 
• Jia Zhihao^1,2 , 
• Duan Junping^1,2 , 
• Cui Jianli^1,2 , 
• Xu Suping^1,2 , 
• Zhang Binzhen^{1,2 , ,} 

• 1.

  Science and Technology on Electronic Test &Measurement Laboratory,North University of China,Taiyuan 030051,China;

• 2.

  Key Laboratory of Instrumentation Science &Dynamic Measurement,North University of China,Ministry of Education,Taiyuan 030051,China