An electrostatically actuated MEMS tilting mirror based on self-assembly
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摘要: 研制了一种基于自组装技术的静电驱动微机电系统(MEMS)倾斜镜,并利用表面硅工艺PolyMUMPs制备了样品。倾斜镜主要由一个中心镜面,两个偏转梁和两个可实现自组装的复合悬臂梁组成。中心镜面离衬底的高度可通过增大金和多晶硅复合悬臂梁的残余应力梯度得到提升。热退火技术被用于提高金层的残余应力。器件结构利用有限元仿真软件进行了优化并通过实验进行了验证。经过200 ℃热退火后,倾斜镜的偏转角度可以达到3.6。该倾斜镜可运用于微光机电系统。Abstract: An electrostatically actuated microelectromechanical systems (MEMS) tilting mirror based on self-assembly is proposed and fabricated using the poly multi-user MEMS process (PolyMUMPs). The tilting mirror is composed of one central mirror, two torsional springs and two bimorph suspension beams for self-assembly. The central mirror can be lifted off the substrate due to residual stresses in Au-polysilicon bimorph suspension beams. Thermal anneal technique is employed to increase the residual stress in Au film. The structure is optimized by Finite Element Analysis (FEA) and experimentally verified. The torsion angle of the tilting mirror gets to 3.6 with 200 C thermal anneal. The tilting mirror has potential to be implemented formirco-opto-electro-mechanical systems (MOEMS).
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Key words:
- tilting mirror /
- MEMS /
- electrostatic actuation /
- self-assembly
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