Chemical structure and mechanical properties of glow discharge polymer films and deuterated glow discharge polymer films
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摘要: 利用低压等离子体增强化学气相沉积技术制备碳氢辉光放电聚合物(GDP)和全氘代辉光放电聚合物(D-GDP)薄膜。利用表面轮廓仪、傅里叶红外光谱仪和纳米压痕技术对制备的样品进行表征，讨论了GDP/D-GDP薄膜的沉积速率、化学结构和力学性能在ICF物理实验用靶应用中的优缺点。结果表明：GDP/D-GDP薄膜的沉积速率都随反应气体流量比例近线性增加，GDP的沉积速率达到2.6 m，D-GDP的沉积速率达到1 m，GDP的沉积速率远大于D-GDP的沉积速率；D-GDP薄膜内部的交联化程度较弱，D-GDP更有利于靶丸内燃料的红外均化；GDP的力学性能明显优于D-GDP，更有利于ICF物理实验用靶的燃料填充与装配操作。Abstract: Taking advantage of low pressure plasma chemical vapor deposition technology, the hydrocarbon glow discharge polymer (GDP) and deuterated glow discharge polymer (D-GDP) films were fabricated by glow discharge polymerization technology. The deposition rates, the chemical structures and mechanical properties of films were studied by FTIR spectra, surface profiler and nano-indentation. The results show that the deposition rate of GDP/D-GDP almost linearly increases with the increase of gas flow, the deposition rate of GDP films is higher than that of D-GDP films. The cross-link degree of D-GDP films is lower than that in GDP films. The D-GDP films might be more favorable for IR heating on the DT ice of ICF target. The mechanical property of GDP is better than that of D-GDP.
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Key words:
- glow discharge polymer /
- deposition rate /
- IR heating /
- mechanical properties
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