Time of flight mass spectrum diagnosis for pulsed plasma
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摘要: 根据脉冲等离子体关键特征参数的特点及相关应用需求，基于垂直引入式有网反射二阶空间聚焦技术，研发了脉冲等离子体飞行时间质谱诊断系统，其质量分辨率约为1690 (FWHM)，离子能量诊断范围为3~150 eV，时间分辨率约为0.45 s。通过对典型脉冲等离子体开展飞行时间质谱分析和研究，获得了离子质谱、离子能量分布函数等重要特征参数。等离子体以不同价态的Ti离子为主，Ti+最可几能量约为23 eV，Ti2+最可几能量约为48 eV。Abstract: According to the characteristics of and application requirements for pulsed plasma, a time of flight mass spectrometry diagnosis system for pulsed plasma has been developed using orthogonal-injection, grid reflecting and two-stage space focusing method. The mass resolution, the range of detecting energy, and the time resolution are about 1690 (FWHM), 3-150 eV and about 0.45 s respectively. The important characters, such as ion mass spectrometry and ion energy distribution function, have been achieved by time of flight mass spectrometry researching and analyzing of typical pulsed plasma. The dominating components are Tin+ ions with different charge state, and the most probable energies of Ti+ and Ti2+ ions are nearly 23 eV and 48 eV respectively.
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Key words:
- pulsed plasma /
- time of flight /
- mass resolution /
- ion mass spectrum /
- ion energy distribution function
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