Mathematical model and experiment for preparing uniform film by PLD on large surface
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摘要: 由于激光烧蚀靶材产生的等离子体呈高斯分布,其中所包含粒子密度及性能的空间分布极不均匀,因此脉冲激光沉积法难以制备性能与膜厚均匀的大面积薄膜。提出并构建了衬底自转与一维变速平移机构,衬底匀速自转的同时,进行一维平移,越靠近等离子体中心平移速率越大、反之越小,达到均匀镀膜的目的;在此基础上建立了机构运动参数对膜厚影响的数学模型,通过仿真模拟分析关键参数对膜厚分布的影响;通过运动参数优化指导实验,最终获得了直径为200 mm、不均匀性不超过4%的大面积类金刚石膜,与仿真优化结果吻合。Abstract: Because plasma generated through laser ablation takes on a Gaussian form, dimensional distribution of quantity and kinetic energy of particles are terribly uneven, its difficult to prepare large area films with uniform thickness and performance by pulse laser deposition. In our study, a translation device was designed, the shifting velocity of the rotational substrate increased gradually while approaching the center of plasma, whereas decreased gradually while departing in order to obtain a uniform film. The math model of influence of motion parameters on thickness of the film was founded. Finally, through simulation and optimization, the uniform diamond-like carbon film with diameter of 200 mm and thickness variation below 4% was prepared by pulse laser deposition.
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Key words:
- pulsed laser deposition /
- large planar surface /
- uniform film /
- diamond-like carbon film
期刊类型引用(2)
1. 陆益敏, 黄国俊, 郭延龙, 丁方正, 陈霞, 韦尚方, 米朝伟. 激光沉积大面积均匀类金刚石膜的设计改进及实验. 兵工学报. 2017(03): 555-560 . 百度学术
2. 王利, 王鹏, 王刚, 王培培, 白云立, 刘华松. 制备工艺条件对SiO_2薄膜非均质特性的影响. 强激光与粒子束. 2016(02): 46-51 . 本站查看
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