Method of big step height measurements based on white light frequency domain interferometry
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摘要: 基于白光频域干涉的基本原理，提出了一种可实现高分辨率和大台阶高度测量的方法，利用该方法进行台阶高度测量时，其测量范围取决于所用干涉光源的中心波长和光谱仪的分辨率，可达mm量级。在原理验证性实验中，利用该方法已经实现了最大高度为298.57 m的台阶高度测量，多次重复测量的标准偏差不超过0.03 m，最大均方根误差为0.94 m，实验测量结果与台阶高度真实值具有很好的一致性。Abstract: A novel method based on white light frequency domain interferometry to measure the big step height with high resolution is presented. The measuring range is determined by the central wavelength of the light source and the spectral resolution of the spectrometer, and the maximal range is up to millimeter magnitude. In the verification experiments, the 298.57 m step height was successfully measured with this method, the standard deviation of repeated measurements is less than 0.03 m, the maximal root mean square error is 0.94 m and the experimental results agree well with the actual values.
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Key words:
- step /
- height measurements /
- frequency domain interferometry /
- gauge block
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