Abstract: Due to lack of complete set of testing equipment and methods, and no unified evaluation parameters at present, the tool quality can not be comprehensively and systematically tested. The paper proposes a method that can test the roughness value, sharpness value and the range of micro-defect of diamond tool at the same time based on the atomic force microscope and ultra precision aerostatic bearings. In order to meet the measurement requirements for the surface profile of the diamond tools, the measurement system is constructed based on the atomic force microscope, the vibration isolation platform, the 2D mobile platform and the ultra precision aerostatic bearings. The surface morphology of the cutting edge of diamond tool is accurately measured. The roughness value, sharpness value and the range of micro-defect of diamond tool are accurately extracted by special measurement software. The measurement errors are analyzed and the control requirements are proposed. The test system based on above analysis can achieve comprehensive evaluation of multi-parameters, and laid the foundation for the quality evaluation of diamond tool in ultra-precision machining.