Formation of redeposit in chemical etching process of fused silica and its effect on laser-induced damage
-
摘要: 化学刻蚀是提升熔石英光学元件抗激光损伤性能的重要后处理技术之一,但刻蚀后熔石英表面附着的沉积物对其表面质量、透射性能和抗激光损伤性能有很大影响。使用光学显微镜和原子力显微镜表征了化学刻蚀后附着于熔石英表面的沉积物的微观形貌,并分析了其形成机理;X射线能谱分析表明化学刻蚀后熔石英表面沉积物主要由Fe,Ni,Al等元素的金属盐组成。损伤阈值测试结果表明熔石英表面高密度沉积物区域的损伤阈值明显低于非沉积物区域,沉积物对熔石英光学元件的抗激光损伤性能产生严重影响,它们是诱导熔石英激光损伤的前驱体。Abstract: Chemical etching is one of the major post-processing techniques to improve laser-induced damage performance of fused silica optics, but deposits adhered to the surface of etched optics affect the surface quality, transmission performance and laser-induced damage resistance of fused silica a lot. In this work, optical microscope and atomic force microscope (AFM) were used to characterize the surface morphology of deposits adhered to the etched surface of fused silica. In addition, the formation process of the deposits was analyzed. Energy dispersive X-ray analysis shows that deposits adhered to the surface of etched fused silica are mainly composed of metallic salts of Fe, Ni and Al elements. Damage threshold test results show that the areas with high density deposits on fused silica surfaces have lower damage thresholds than the areas with few deposits. So redeposits adhered to the etched surface have the great influence on laser damage performance of fused silica, they are precursors inducing laser-damage of fused silica.
-
Key words:
- laser optics /
- fused silica /
- chemical etching /
- redeposit /
- laser-induced damage
期刊类型引用(7)
1. 甘延青,罗光耀,李飞,张北镇,李春霞,王淦平,金晓,宋法伦. 大功率重复频率高电压脉冲充电电源研制. 强激光与粒子束. 2025(03): 22-29 . 本站查看
2. 江进波,徐林,罗正,杨文,唐铭,姚延东,陈锐. 基于LC串联谐振的高压恒流充电电源设计. 强激光与粒子束. 2024(05): 46-53 . 本站查看
3. 冯传均,伍友成,何泱,戴文峰,付佳斌,刘宏伟. 正负双极性重复频率充电电源研制. 强激光与粒子束. 2023(03): 121-127 . 本站查看
4. 冯传均,何泱,戴文峰,伍友成,付佳斌,王敏华. 串联谐振高压电容充电电源设计及分析. 强激光与粒子束. 2019(05): 55-60 . 本站查看
5. 蔡政平,李伟松. 太赫兹器件测试用高重复频率高压脉冲电源. 强激光与粒子束. 2018(02): 62-67 . 本站查看
6. 张彬,杨欣欣,周赛,蔡晨,赵辉,韩吉庆,潘忠泉. 波长校准用低压石英汞灯驱动电源的研制. 化学分析计量. 2017(02): 106-109 . 百度学术
7. 缪亚运,谷鸣,陈志豪,童金. 质子治疗装置脉冲电源研制. 核技术. 2016(04): 32-36 . 百度学术
其他类型引用(9)
-

计量
- 文章访问数: 1047
- HTML全文浏览量: 180
- PDF下载量: 303
- 被引次数: 16