Abstract: A compact repetitive pulsed power system on the basis of fast Marx generator was developed in order to realize pulsed power device miniaturization. It is mainly composed of fast Marx generator and trigger pulse supply. There are polypropylene film capacitors with plastic shell, miniaturized gas switches, isolated inductors and SF6 gas insulation in the 18-stage fast Marx generator, whose storage energy density is 25.7 kJ/m3. An 8-stage Marx generator circuit is utilized in trigger pulse supply with the maximal output voltage of 80 kV and pulse duration of about 500 ns. The compact pulsed power source integrated has a volume of about 0.2 m3. In single pulse operation mode, the voltage of output pulse on an 18 resistor load is up to 765 kV with the pulse width (FWHM) of 162 ns, the rising time of 54 ns and the power density of 157 GW/m3. In repetitive mode with the rate of 5 Hz, the average peak voltage of 5 successive pulses is about 550 kV because of being limited by repetitive charging voltages. The pulsed power source can apply to biology, medical research and so on. This work can also provide experience for building a repetitive high pulsed power system with high performance.