基于PET基片的柔性石墨烯应变计加工方法

袁明权; 杨荷; 张照云; 熊壮

doi:10.11884/HPLPB201830.170423

基于PET基片的柔性石墨烯应变计加工方法

doi: 10.11884/HPLPB201830.170423

中国工程物理研究院电子工程研究所, 四川绵阳 621999

基金项目:

中国工程物理研究院科学技术发展基金项目 2015B0403083

详细信息

作者简介:
袁明权(1972-)，男，硕士，副研究员，从事MEMS惯性器件研究；mq_yuan@163.com

通讯作者:
熊壮(1984-), 男，博士，副研究员, 从事MEMS谐振器与MEMS惯性器件研究；xiong.zhuang@caep.cn

中图分类号: O613.71
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出版历程
- 收稿日期: 2017-10-31
- 修回日期: 2017-12-04
- 刊出日期: 2018-03-15

Fabrication of flexible graphene strain sensor based on PET substrate

Institute of Electronic Engineering, CAEP, P.O.Box 919-512, Mianyang 621999, China

摘要

摘要: 针对PET塑料耐温性能较差，与标准微纳加工工艺不兼容等问题，开发了面向PET塑料基底材料的光刻、镀膜等微纳加工工艺。通过CVD生长、转移等方式将单层石墨烯薄膜附着于0.5 mm厚PET基底，并采用微纳加工的方式制备了柔性石墨烯压阻应变计。工艺结果表明，本研究所提出的加工方法适用于以PET塑料作为衬底材料的柔性微纳器件的制作。通过对PET塑料衬底施加应变并测量石墨烯的电阻变化率，可计算出石墨烯的压阻应变系数约为1.3。
- 石墨烯 /
- 应变计 /
- PET塑料 /
- 微纳加工
Abstract: In view of the incompatibility of PET material with the standard microfabrication due to its low intolerance to high temperature, an effective fabrication process including lithography, metal deposition and reactive ion etching have been developed which paves the way for direct micro processing on PET. Based on such a method, thin film graphene layer was grown and transferred to 0.5 mm thick PET substrate and the graphene strain sensor was successfully fabricated. According to the measurement results, the piezoresistive gauge factor of the graphene can be estimated about 1.3, which is in good accordance with the value given in literature. Such fabrication method can also be applied in the domain where flexible micro devices are required.
- graphene /
- strain sensor /
- PET /
- micro-fabrication

HTML全文

图 1 石墨烯压阻应变计设计图案

Figure 1. Geometry design of graphene strain sensor

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图 2 石墨烯压阻应变计加工流程图

Figure 2. Fabrication process flow of graphene strain sensor

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图 3 在PET塑料片上制备出的石墨烯压阻应变计

Figure 3. Fabricated graphene strain sensor on PET

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图 4 单层石墨烯的拉曼光谱图

Figure 4. Raman spectra of graphene used in this study

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图 5 采用导电银胶将导线与金属焊盘相连接

Figure 5. Graphene strain sensor after wire bonding

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图 6 应变计装夹在应力加载装置上，并采用电阻测试仪对石墨烯电阻进行测试

Figure 6. Sample fixed onto a strain loader and resistance meter used to measure resistance

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图 7 石墨烯电阻变化率与应变关系曲线

Figure 7. Resistance variation rate of graphene with different applied strain

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