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离子能量分析器测量特性的仿真研究

翟红雨 程健 陈银华 陆伟

翟红雨, 程健, 陈银华, 等. 离子能量分析器测量特性的仿真研究[J]. 强激光与粒子束, 2020, 32: 084002. doi: 10.11884/HPLPB202032.190459
引用本文: 翟红雨, 程健, 陈银华, 等. 离子能量分析器测量特性的仿真研究[J]. 强激光与粒子束, 2020, 32: 084002. doi: 10.11884/HPLPB202032.190459
Zhai Hongyu, Cheng Jian, Chen Yinhua, et al. Simulation study on measurement characteristics of ion energy analyzer[J]. High Power Laser and Particle Beams, 2020, 32: 084002. doi: 10.11884/HPLPB202032.190459
Citation: Zhai Hongyu, Cheng Jian, Chen Yinhua, et al. Simulation study on measurement characteristics of ion energy analyzer[J]. High Power Laser and Particle Beams, 2020, 32: 084002. doi: 10.11884/HPLPB202032.190459

离子能量分析器测量特性的仿真研究

doi: 10.11884/HPLPB202032.190459
基金项目: 国家自然科学基金项目(11575182)
详细信息
    作者简介:

    翟红雨(1996—),男,硕士研究生,从事嵌入式测量系统的理论与仿真分析;hyzhai@mail.ustc.edu.cn

    通讯作者:

    程 健(1964—),男,副教授,主要从事等离子体测量设备系统的研制与应用;chengj@ustc.edu.cn

  • 中图分类号: O53

Simulation study on measurement characteristics of ion energy analyzer

  • 摘要: 针对空间等离子体及其模拟环境、空间原子氧及其模拟环境对离子能谱测量的需要,利用仿真软件COMSOL,对离子能量分析器的低能离子测量特性进行了仿真研究。介绍了离子能量分析器的工作原理,对离子能谱测量过程进行了公式推导。通过对三种待选仪器设计方案进行离子透过率仿真分析,确定了一种较优的仪器设计方案。多种离子温度下的误差分析结果也表明,该设计方案能够较为准确地测量离子能量分布。分析了电场畸变、等离子鞘层、栅网对齐方式和离子温度对测量结果的影响,根据仿真结果对一些仿真实验现象做出了合理的解释。
  • 图  1  离子能量分析器典型结构

    Figure  1.  Typical structure of ion energy analyzer (IEA)

    图  2  理想情况下离子能量分析器测量曲线

    Figure  2.  Ideal IEA measurement curve

    图  3  模型简化过程

    Figure  3.  Model simplification processes

    图  4  三种设计方案的离子透过率曲线

    Figure  4.  Ion transmission curve of three schemes

    图  5  方案A和方案B的离子透过率曲线

    Figure  5.  Ion transmission curve for scheme A and scheme B

    图  6  离子能量分析器内部电场图

    Figure  6.  Internal electric field of IEA

    图  7  不同入射能量下的离子运动轨迹

    Figure  7.  Ion trajectories at different initial energies

    图  8  栅网对齐的两种情况

    Figure  8.  Two cases of grid alignment

    图  9  两种对齐方式下的离子透过率曲线

    Figure  9.  Ion transmission curve in two alignments

    图  10  不同仪器电位下的离子透过率曲线

    Figure  10.  Ion transmission curve at different instrument potentials

    图  11  不同仪器电位下的I-V曲线

    Figure  11.  I-V curve at different instrument potentials

    图  12  不同温度下的I-V曲线和离子能量分布

    Figure  12.  I-V curve and ion energy distribution at different temperatures

    表  1  不同温度下离子速度拟合结果

    Table  1.   Ion velocity fitting results at different temperatures

    temperature/Kaverage velocity/(m·s−1relative error/%${\varepsilon _{\rm{RMSE}}}$/eV
    5007593−0.090.05
    100076260.340.11
    150076570.750.07
    200078112.770.73
    下载: 导出CSV
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出版历程
  • 收稿日期:  2019-12-09
  • 修回日期:  2020-06-08
  • 刊出日期:  2020-08-13

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