Research progress on fiber laser spectral beam combining system and grating thermal analysis
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摘要: 受热效应、光学损伤与非线性效应等因素的限制，单纤的功率提高困难。因此通过光学元件将多束激光进行合束的光束合成技术应运而生。光谱合束方案具有结构简单，合束光束质量好等优点，逐渐成为了合束技术发展的主流。简要介绍了光纤激光光谱合束的几种常见合束方案，对比分析了几种合束技术的优缺点。对光谱合束中存在的光栅热畸变问题，从理论研究和实验研究两个方面进行了针对性的分析与讨论，并对光谱合束未来的发展趋势进行了展望。Abstract: The output power of single fiber is limited by the thermal effects, laser damage threshold, and nonlinear optical effects. Beam combining technology has been proposed to break through the limit of single fiber and achieve higher output power fiber laser. Spectral beam combining technology has the advantages of good beam quality and simple structure, which stands out among many beam combining technologies. We review several typical kinds of spectral beam combining technologies of fiber lasers, including their principles, current status, advantages and disadvantages. The recent progress of thermal distortion of the grating was introduced and discussed from the aspects of theoretical and experimental research, and the development trend of spectral beam combining technology are prospected.
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Key words:
- laser optics /
- spectral beam combining /
- thermal analysis /
- fiber laser /
- beam quality
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图 1 基于双色片的光谱合束系统原理示意图
Figure 1. Schematic diagram of dielectric mirrors spectral beam combining
图 2 基于干涉滤光片的光谱合束结构示意图及干涉滤光片透射谱
Figure 2. Schematic diagram of interferometric-filter-based spectral beam combining and transmission spectrum
图 3 基于边缘滤波器的光谱合束方案的实验配置
Figure 3. Experimental configuration of filter-based SBC scheme
图 4 光谱合束系统中使用的边缘滤波器的结构及在不同的表面粗糙度下边缘滤波器的反射率曲线
Figure 4. Structure of the edge filter used in the SBC system and the reflectance curves of the edge filter under different surface roughness
图 5 热透镜被动补偿方案的实验装置。
Figure 5. Experimental setup of passive compensation scheme for thermal lens
图 6 组合光束质量优化前后值，插图是在不同功率下焦平面中的光束轮廓
Figure 6. The M2 values of the optimized combined beam quality， the insets are the transversal beam profile in focal plane under different power
图 7 体布拉格光栅衍射谱及基于体布拉格光栅的光谱合束原理示意图
Figure 7. Diffraction spectral of VBG and schematic diagram of reflective-VBG-based spectral beam combining
图 8 5路VBG光谱合束结构示意图
Figure 8. Schematic diagram of 5-channel VBG-based spectral beam combining
图 10 合束光束的光谱图及光栅衍射效率曲线图
Figure 10. The measured spectrum of the combined beam and the efficiency curve
图 11 基于透射式和反射式衍射光栅的光谱合束原理示意图
Figure 11. Schematic diagram of transmission-grating and reflective-grating spectral beam combining
图 12 金属介质衍射光栅结构示意图
Figure 12. Schematic of the mixed metal dielectric reflective grating
图 14 外腔光纤激光光谱合束结构示意图
Figure 14. Schematic diagram of spectral beam combining of fiber laser in an external cavity
图 15 外腔光谱合束系统实验结构示意图
Figure 15. Experimental setup schematic diagram of spectrum beam combining system by external-cavity oscillator
图 16 （a）子光束以及合束光束的光束质量；（b）五路激光合束后输出激光光谱图
Figure 16. (a) Beam quality of laser units and output light after combination; (b) Spectrum after beam combination of five MOPA channels
图 17 Aculight公司光纤激光光谱合束示意图
Figure 17. Schematic diagram of spectral beam combining of fiber laser in Aculight corporation
图 18 耶拿大学光纤激光光谱合束示意图
Figure 18. Schematic diagram of spectral beam combining of fiber laser in University Jena
图 19 反射衍射光栅及其在1064 nm处测得的衍射效率
Figure 19. Reflective diffraction grating and measured efficiency at 1064 nm
图 20 中国工程物理研究院光纤激光光谱合束示意图
Figure 20. Schematic diagram of spectral beam combining of fiber laser in China Academy of Engineering Physics
图 21 中国科学院上海光学精密机械研究所光纤激光光谱合束示意图
Figure 21. Schematic diagram of spectral beam combining of fiber laser in SIOM
图 22 反射式MLD衍射光栅及其衍射效率
Figure 22. MLD reflective diffraction grating and measured efficiency of both TE and TM polarization
图 23 中国航天科技集团光纤激光光谱合束示意图
Figure 23. Schematic diagram of spectral beam combining of fiber laser in CASC
图 25 Aculight公司光纤激光光谱合束示意图
Figure 25. Schematic diagram of spectral beam combining of fiber laser in Aculight corporation
图 28 100 kW激光辐照下光栅温度分布
Figure 28. Simulated temperature distribution used for SBC of 100 kW optical power
图 29 光栅内部的光程差随热变形的变化图
Figure 29. Optical path difference inside the grating with thermal deformation
图 30 不同辐照功率密度，合成光束和单光束的光束强度分布。其中，图中心的光斑代表组合光束的强度分布，图右上角的光斑显示单光束的强度分布
Figure 30. Intensity distribution of the combined beams and that of a single emitter for different power densities，where the spots on the centers of the figures represent the intensity of the combined beams，and the spots on the upper right corners of the figures show the intensity of the beams from a single emitter
图 32 基板、薄膜和光栅浮雕的近场相位调制和远场强度分布。I/I0是归一化强度（波长为1064 nm）
Figure 32. Near-field phase modulation and far-field intensity distribution of A，B，and C，where A contains deformations of substrate，films，and grating reliefs，B contains substrate deformation only，and C is the circumstance without thermal deformation. I∕I0 is the normalization intensity (λ＝1064 nm)
图 33 多层电介质膜光栅激光辐照升温机制
Figure 33. Schematic diagram of the laser irradiation MLD grating temperature rise mechanism
图 34 光栅承受10.05 kW激光辐照30 s时前表面温度分布情况
Figure 34. Temperature distribution of 10.05 kW irradiation on the MLD grating front surface measured by the infrared thermal imager
图 35 （a）不同功率激光辐照时光栅上表面最高温度实验与模拟结果对比图；（b）不同功率激光辐照时光栅背面实验与模拟的温度升温曲线图
Figure 35. (a) Simulation and experimental maximum MLD grating front surface temperature under different laser irradiation powers. (b) Maximum MLD grating back surface temperature as a function of the time and corresponding curves for different irradiation powers
图 36 光栅热畸变实验装置示意图
Figure 36. Schematic of the configuration used for the MLD grating surface distortion measurement
图 37 高功率激光辐照下的干涉条纹图像
Figure 37. Interference fringes under high power fiber laser irradiation
图 40 （a）多层介质膜光栅测试装置示意图；（b）激光辐照前后光栅干涉条纹图样对比图
Figure 40. (a) Test setup for measuring distortion of the multi-layer dielectric grating under high brightness optical loads. (b) Interferograms for the grating with and without a 1.5 kW/cm2 peak irradiance，70 W average power optical load
图 41 实验所用光栅及承受激光辐照1000 s时表面畸变情况
Figure 41. MLD grating and expansion distribution after 1000 s laser irradiation
图 42 光栅热变形实验示意图
Figure 42. Experimental schematic for MLD grating thermal deformation detection.
图 44 激光光束质量随辐照激光功率变化图
Figure 44. Beam quality factor of the laser versus the power density
图 46 （a）光栅表面温度与光束质量随功率密度的变化图；（b）束腰直径与远场发散角随功率密度的变化
Figure 46. (a) Temperature on grating surface and M2 versus the irradiation laser power density; (b) Waist diameter and far field divergence angle versus the irradiation laser power density
表 1 组合光束质量变化
Table 1. Beam quality M2-Factors of the combined beams
power density/（kW·cm−2） M2 0 1.00 0.5 1.41 1 2.30 1.5 3.35 2 4.42 3 6.48 
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