Plasma combined with hexamethyldisilazane treatment to improve anti-vacuum pollution performance of antireflective coatings
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摘要: 本文采用溶胶-凝胶法制备了SiO2增透膜，然后对其进行等离子体结合六甲基二硅胺烷（HMDS）表面改性处理。研究了后处理改性对增透膜表面形貌、微观结构、光学性能及激光损伤性能的影响规律，获得了抗真空有机污染的二氧化硅增透膜。结果表明，增透膜在采用等离子体结合HMDS表面改性处理后，膜层收缩、粗糙度下降、极性羟基等有机基团含量减少；两步后处理改善了增透膜膜层结构和光学性能，显著提高了膜层疏水能力和真空条件下的抗污染性能，并且对溶胶-凝胶二氧化硅增透膜的高损伤阈值属性不产生影响。Abstract: The SiO2 antireflective (AR) coating was prepared by sol-gel method and then modified by plasma combined with hexamethyldisilazane (HMDS). The effects of treatment on the surface morphology, microstructure, optical properties, and laser induced damage performance are investigated to obtain the SiO2 antireflective coating with good resistance to vacuum organic contaminants. The results show that the antireflection coating shrinks, the roughness decreases and the content of polar hydroxyl group decreases after plasma combined with HMDS surface modification. Plasma and HMDS surface treatment optimizes the structure and optical properties of the film. The hydrophobic capability of the film and the resistance performance to contaminants under vacuum conditions are significantly enhanced without bad effect on the high threshold of sol-gel silica antireflection coating.
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图 1 等离子体处理前后化学膜的傅里叶变换红外光谱
Figure 1. FTIR spectra of sol-gel films before and after plasma treatment
图 2 化学膜S2的扫描探针显微镜三维图像
Figure 2. Three dimensional images of sol-gell film S2 obtained by scanning probe microscope
图 4 化学膜两步处理前后透射性能变化
Figure 4. Transmission spectra of sol-gel film before and after two-step treatment
图 5 S0，S2真空污染实验前后透过率变化
Figure 5. Transmission spectra of of S0 and S2 before and after vacuum pollution
图 6 S00，S1，S3真空污染实验前后透过率变化
Figure 6. Transmission spectra of S00, S1 and S3 before and after vacuum pollution
表 1 化学膜S2、S3膜厚和折射率变化
Table 1. Changes of thickness and refractive index of sol-gel films S2 and S3
sample thickness/nm refractive index before treatment plasma treated HMDS before treatment plasma treated HMDS S2 90.03 71.98 72.58 1.2113 1.1914 1.2207 S3 84.67 65.98 66.03 1.2022 1.1977 1.2232 
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