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同步辐射束流尺寸测量干涉仪的设计与仿真

孙良伟 罗箐

孙良伟, 罗箐. 同步辐射束流尺寸测量干涉仪的设计与仿真[J]. 强激光与粒子束, 2021, 33: 084002. doi: 10.11884/HPLPB202133.210236
引用本文: 孙良伟, 罗箐. 同步辐射束流尺寸测量干涉仪的设计与仿真[J]. 强激光与粒子束, 2021, 33: 084002. doi: 10.11884/HPLPB202133.210236
Sun Liangwei, Luo Qing. Design and simulation of interferometer for synchrotron radiation beam size measurement[J]. High Power Laser and Particle Beams, 2021, 33: 084002. doi: 10.11884/HPLPB202133.210236
Citation: Sun Liangwei, Luo Qing. Design and simulation of interferometer for synchrotron radiation beam size measurement[J]. High Power Laser and Particle Beams, 2021, 33: 084002. doi: 10.11884/HPLPB202133.210236

同步辐射束流尺寸测量干涉仪的设计与仿真

doi: 10.11884/HPLPB202133.210236
基金项目: 国家自然科学基金大科学装置联合基金培育项目(U1832169);中国科学技术大学“双一流”建设项目
详细信息
    作者简介:

    孙良伟(1997—),男,硕士,从事加速器束流诊断研究

    通讯作者:

    罗 箐(1984—),男,副教授,博士,从事束流物理与加速器技术研究

  • 中图分类号: TL506

Design and simulation of interferometer for synchrotron radiation beam size measurement

  • 摘要: 基于同步光的干涉法,是一种非拦截高精度的束流截面测量手段。相比传统成像法,干涉法可以测量更小的束团尺寸、分辨率更好,较短测量波长下有望获得亚μm级的分辨率,因此在同步辐射光源中得到广泛应用。对合肥光源HLS II的原有同步光干涉装置,提出了将原有的干涉光路中第一面聚焦透镜换成RC结构聚焦反射镜,第二面单透镜换成双胶合透镜,以达到在不改变光路光轴情况下减小色散和几何像差,从而提高光路成像质量的目的。采用几何光路设计方法对成像质量进行评价,并进行物理光学仿真计算,得到测量系统的干涉条纹。仿真结果表明:光学系统成像的艾里斑半径减小约35%,点列图的均方根半径减小了约99%,波前差也减小了约75%,调制传递函数(MTF)的截止频率提高了约65%,采用聚焦反射镜代替原有的聚焦透镜可大幅提升光路成像质量。
  • 图  1  干涉仪示意图

    Figure  1.  Schematic diagram of interferometer

    图  2  干涉仪光学系统示意图

    Figure  2.  Schematic of the optical system of the interferometer

    图  3  束流尺寸测量误差随相干度的变化

    Figure  3.  Change of beam size measurement error with coherence

    图  4  相干度随狭缝间距的变化

    Figure  4.  Change of coherence with the slit separation

    图  5  RC聚焦反射镜示意图

    Figure  5.  Schematic of RC focusing mirror

    图  6  光源到狭缝间距与相干度的关系

    Figure  6.  Relationship between the distance between the light source and the slit and the degree of coherence

    图  7  干涉仪仿真模拟图

    Figure  7.  Simulation diagram of interferometer

    图  8  垂直方向干涉条纹和拟合图(L=30 m,d=16 mm)

    Figure  8.  Vertical interference fringes and fitting graph (L=30 m, d=16 mm)

    图  9  水平方向干涉条纹和拟合图(L=40 m,d=18 mm)

    Figure  9.  Horizontal interference fringes and fitting graph (L=40 m, d=18 mm)

    图  10  数据点和拟合曲线

    Figure  10.  Data points and fitted curve

    图  11  光强不平衡对相干度测量和束流尺寸测量的影响

    Figure  11.  Effect of intensity imbalance factor on coherence and beam size

    表  1  干涉仪光路结构参数

    Table  1.   Structure parameters of interferometer

    $ {L}_{{x}} $/m $ {L}_{{y}} $/m $ \lambda /\mathrm{n}\mathrm{m} $ $ \Delta \lambda $/nm ${w}_{{x} }\times {w}_{{y} }$ $ {d}_{{y}} $/mm $ {d}_{{x}} $/mm $ {f}_{1} $/mm $ {f}_{2} $/mm
    vertical horizontal
    40 30 500 10 $ 2\;\mathrm{m}\mathrm{m}\times 1\;\mathrm{m}\mathrm{m} $ $ 1\;\mathrm{m}\mathrm{m}\times 2\;\mathrm{m}\mathrm{m} $ 16 18 1000 100
    下载: 导出CSV

    表  2  干涉仪光路质量评价结果对比

    Table  2.   Comparison of the results of interferometer optical path quality evaluation

    Airy disk radius/μm RMS radius of spot diagram/μm wave front error/$ \lambda $ cut-off frequency of MTF/(lp·mm−1
    original design $ 56.55 $ $ 24.25 $ $ 0.207 $ $ 20.2 $
    new design $ 36.48 $ $ 0.05 $ $0.050$ $ 33.5 $
    下载: 导出CSV

    表  3  仿真结果

    Table  3.   Results of simulation

    L/m d/mm $ \left|\gamma \right| $ $\sigma /{\text{μ}}\mathrm{m}$
    vertical profile 30 16 0.56 160.7
    30 18 0.47 162.9
    30 20 0.40 161.5
    horizontal profile 40 16 0.52 227.5
    40 18 0.40 239.4
    40 20 0.42 209.6
    下载: 导出CSV

    表  4  误差计算表

    Table  4.   Error calculation table

    fitting value of visibility true value of the degree of coherence absolute error of visibility $ {u}_{\left|\gamma \right|} $ relative error of visibility $ {\delta }_{\left|\gamma \right|} $
    $ {V}_{\rm{y}}=\dfrac{2\sqrt{\rho }}{1+\rho }\left|{\gamma }_{\rm{y}}\right| $ $ \left|{\gamma }_{\rm{y}}\right| $ $ \dfrac{2\sqrt{\rho }}{1+\rho }\left|{\gamma }_{\rm{y}}\right|-\left|{\gamma }_{\rm{y}}\right| $ $ \left(\dfrac{2\sqrt{\rho }}{1+\rho }\left|{\gamma }_{\rm{y}}\right|-\left|{\gamma }_{\rm{y}}\right|\right)/\left|{\gamma }_{\rm{y}}\right| $
    下载: 导出CSV

    表  5  垂直干涉仪光路参数和测量标准差

    Table  5.   Parameters of vertical interferometer and measurement standard deviation

    L/mm $ \lambda /\mathrm{n}\mathrm{m} $ d/mm $ \left|\gamma \right| $
    30000±10 500±10 16±0.01 0.6±0.06
    下载: 导出CSV
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出版历程
  • 收稿日期:  2021-06-15
  • 修回日期:  2021-08-08
  • 网络出版日期:  2021-08-17
  • 刊出日期:  2021-08-15

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