Optical component damage monitoring method based on acoustic emission
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摘要: 光学元件损伤是限制激光通量水平提高的重要因素之一。为快速、准确地检测光学元件损伤是否产生，支撑光学元件循环修复策略的使用，研究并提出了基于声发射技术的光学元件损伤检测方法，通过研究光学元件损伤产生的声发射信号特征，判断光学元件是否发生损伤，使用一种基于二次相关和相关峰精确插值（FICP）的时延估计算法，通过仿真验证了该算法的可行性，结合时差定位原理建立了损伤位置求解方法，并通过实验进行了验证。研究结果表明：该方法能从监测信号中快速地获得损伤的位置估计，其平均定位误差为8.61 mm，计算时间为0.143 s/次，对大口径光学元件的损伤在线监测具有应用潜力。Abstract: Optical component damage is one of the important factors that limit the improvement of laser flux level. To quickly and accurately detect whether optical component damage occurs and support the use of optical component cycle repair strategy, we proposed an optical component damage detection method based on acoustic emission technology. Whether the optical component is damaged was judged by studying the characteristics of acoustic emission signals generated by optical component damage. A time delay estimation algorithm based on quadratic correlation and fine interpolation of correlation peak (FICP) was developed. The feasibility of the algorithm was verified by simulation. Combined with the principle of time difference location, a method for solving the damage location was established and verified by experiments. The results show that the method can quickly obtain the damage location estimation from the monitoring signal. The average positioning error is 8.61 mm, and the average calculation time for positioning is 0.143 s. The method has the potential to be applied to on-line damage monitoring of large-aperture optical components.
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Key words:
- laser optics /
- damage monitoring /
- acoustic emission /
- time delay estimation /
- sound localization
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图 4 两种算法的RSME和时延估计绝对误差比较
Figure 4. Comparison of RSME and absolute error of TDE between the two algorithms
图 8 AE信号幅值随激光能量密度的变化
Figure 8. Variation of AE signal amplitude with laser energy density
图 10 玻璃样品的传感器布置和测试点位置
Figure 10. Sensor layout and test point location of glass samples
表 1 不同判据对熔石英损伤判定情况
Table 1. Different criteria for judging fused silica damage
criteria number of damage points AE signal amplitude judge 13 microscopic observation 14 (damage size ＜ 50 μm
at one of the test points)
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