百瓦级近衍射极限VCSEL泵浦激光器

李雪鹏; 杨晶; 筵兴伟; 陈中正; 袁磊; 杨俊波; 王小军; 彭钦军; 许祖彦

doi:10.11884/HPLPB202234.220078

百瓦级近衍射极限VCSEL泵浦激光器

doi: 10.11884/HPLPB202234.220078

李雪鹏^{1, 2,},
杨晶^{1, 3, ,},
筵兴伟³,
陈中正^{1, 3},
袁磊^{1, 3},
杨俊波⁴,
王小军^{1, 3, ,},
彭钦军^{1, 3},
许祖彦^{1, 3}

1.
中国科学院理化技术研究所，中国科学院固体激光重点实验室，北京 100190
2.
中国科学院大学，北京 100190
3.
齐鲁中科光物理与工程技术研究院，济南 250000
4.
国防科技大学文理学院，长沙 410073

详细信息

作者简介:
李雪鹏，lixuepeng16@mails.ucas.ac.cn

通讯作者:
杨　晶，yangjing@mail.ipc.ac.cn

王小军，wangxj@mail.ipc.ac.cn

中图分类号: TN248.1
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- 文章访问数: 1240
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- 被引次数: 0
出版历程
- 收稿日期: 2022-03-21
- 修回日期: 2022-05-19
- 网络出版日期: 2022-05-26
- 刊出日期: 2022-07-20

Hundred-watt level VCSEL-pumped laser with near diffraction limit beam quality

Li Xuepeng^{1, 2
,},
Yang Jing^{1, 3
, ,},
Yan Xingwei³,
Chen Zhongzheng^{1, 3},
Yuan Lei^{1, 3},
Yang Junbo⁴,
Wang Xiaojun^{1, 3
, ,},
Peng Qinjun^{1, 3},
Xu Zuyan^{1, 3}

1.
Key Laboratory of Solid State Laser, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
2.
University of Chinese Academy of Sciences, Beijing 100190, China
3.
QiluZhongke Institute of Optical Physics and Engineering Technology, Jinan 250000, China
4.
College of Liberal Arts and Sciences, National University of Defense Technology, Changsha 410073, China

摘要

摘要: 报道了高功率、高光束质量的垂直腔面发射半导体激光器(VCSEL)侧泵的Nd:YAG激光振荡器。从VCSEL泵浦源的主动冷却的热沉结构出发，设计了5个227 W的VCSEL线阵，并且通过优化侧面泵浦大口径激光棒的结构，研制成了具备480 W输出能力的棒状激光模块，相应的光-光效率为49.7%。在此基础上，设计了一种高功率、高光束质量的VCSEL侧面泵浦棒状Nd:YAG激光振荡器。腔内插入望远镜光学元件，并通过优化各光学元件的参数使其工作在热近非稳区域，以达到增大基横模体积和抑制高阶横模目的。最终，获得114 W的输出功率，相应的平均光束质量因子M²为1.42。由于VCSEL具备优秀的波长-温度稳定性，这种高功率、高光束质量的VCSEL泵浦的固体激光器在工业、空间等领域，具有极为广阔的应用前景。
- 垂直腔面发射半导体激光器 /
- 激光振荡器 /
- 近衍射极限光束质量 /
- 高功率 /
- 棒状激光器
Abstract: A high power high beam quality vertical-cavity surface-emitting laser (VCSEL) side-pumped rod Nd:YAG laser oscillator is demonstrated. Based on the macro-channel optimization of the active heat sink for the VCSEL pump source, five 227 W VCSEL linear arrays are manufactured. By optimizing the structure of the side-pumped diffuse chamber, a rod laser module with an output capacity of 480 W and 49.7% optical-to-optical efficiency is developed. Accordingly, a telescopic module is introduced in the laser oscillator to realize a large fundamental mode volume, and thermal-near-unstable parameters is further optimized to suppress higher transversal modes. Finally, an output power of 114 W is obtained with an average beam quality factor M² of 1.42, and the power variations are ± 0.9% over 200 s and ± 4.2% over the temperature range from 18 ℃ to 26 ℃. To the best of our knowledge, this is the first time that a hundred-watt level and near diffraction limit beam quality laser is generated by VCSEL pumped scheme. Due to the excellent temperature stability of the VCSEL, this high-power and high beam quality solid-state laser has a promising competence in industry, space and other complicated environments.
- vertical-cavity surface-emitting laser /
- laser oscillator /
- near diffraction limit beam quality /
- high power /
- rod laser

HTML全文

图 1 1×15 VCSEL线阵

Figure 1. 1×15 VCSEL linear array

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图 2 VCSEL侧面泵浦Nd:YAG棒状激光模块的剖面图。插图：总泵浦功率为1135 W时ϕ8 mm激光棒吸收泵浦功率的分布截面图

Figure 2. Pumping configuration of the VCSEL side-pumped rod Nd:YAG laser module. Inset: the simulation of the absorbed pump power distribution in the middle cross section of the ϕ8 mm rod at total pump power of 1135 W

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图 3 VCSEL侧面泵浦棒状Nd:YAG激光模块的输出功率和光-光转换效率随泵浦功率的变化关系图

Figure 3. Output power and optical-to-optical conversion efficiency of the VCSEL-side-pumped rod Nd:YAG laser module versus the pump power under CW operation

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图 4 带有望远镜光学元件的VCSEL侧面泵浦棒状Nd:YAG激光振荡器的实验装置图

Figure 4. Schematic diagram of the VCSEL side-pumped rod Nd:YAG laser oscillator with telescopic resonator

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图 5 计算的基横模光斑半径随热焦距的变化曲线

Figure 5. Fundamental laser mode radius versus the thermal focal length

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图 6 输出功率随泵浦功率的变化曲线

Figure 6. Output power as a function of the pump power

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图 7 最大输出功率下的VCSEL侧面泵浦棒状激光器的光束质量测量值。插图：光束的二维空间强度分布图

Figure 7. Measured beam quality factors at the maximum output power. Inset: beam two-dimensional spatial profile

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图 8 200 s内的最大的输出功率稳定性的测试曲线。插图：最大的输出功率随冷却液温度的变化曲线

Figure 8. Power-stability test at the highest output over 200 s. Inset: output power versus the coolant temperature

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