Calibration method of capacitance sensor for particle accelerator wire position measurement
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摘要: 在高能同步辐射光源中，为了提高磁铁的准直精度，采用磁中心代替机械中心进行磁铁标定，通过振动线或旋转线等技术获得磁铁的磁中心位置，以及通过电容式位移传感器测量得到丝线的位置，从而实现磁中心与准直靶标的关联。为了实现丝线位置的高精度测量，必须对电容传感器进行精确标定，因此介绍了一种电容式位移传感器，并对其标定方法进行了研究，提出了网格化的数据采集方式以及高阶多项式拟合的数据处理方法，搭建了传感器标定平台并开发了相应的标定控制程序，实现了对传感器的自动控制、数据采集和高精度标定过程。经过分析与对比，标定后的电容传感器达到μm级的位移测量精度，为磁铁的高精度准直提供了基础。Abstract: To improve the alignment accuracy of the magnet in high energy synchrotron radiation source, the magnetic center is used instead of the mechanical center to calibrate, the magnetic center position of the magnet is obtained by vibration wire or rotation wire technology, and the position of the wire is measured by capacitive sensor, so as to realize the association between the magnetic center and the collimation target. To achieve high precision measurement of wire position, it is necessary to calibrate capacitance sensor accurately. In this paper, a kind of capacitive sensor is introduced and its calibration method is studied, the data acquisition method of grid and data processing method of high order polynomial fitting are proposed, the sensor calibration platform is built and the corresponding calibration program is developed, and the automatic and high precision calibration of the sensor is realized. Analysis and comparison show that the calibrated capacitance sensor has achieved the displacement measurement accuracy of μm level, which provides a basis for high-precision collimation of magnets.
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Key words:
- vibration wire /
- capacitive displacement sensor /
- calibration /
- polynomial fitting /
- precision analysis
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图 3 电容式位移传感器工作原理图和工作曲线
Figure 3. Working principle diagram and working curve of capacitive displacement sensor
图 9 水平和垂直方向上丝线位置与电压的关系
Figure 9. The relation between voltage and position of wire in horizontal and vertical directions
表 1 第一阶段长期稳定性测试
Table 1. Phase I long term stability test
X/μm Y/μm X/μm Y/μm average method pairwise cycle method maximum deviation 1.6 6.2 3.8 7.3 sensor 011 minimum deviation −2.5 −3.5 −2.9 −7.6 standard deviation 0.8 1.7 1.0 2.2 maximum deviation 3.6 5.7 4.4 10.7 sensor 015 minimum deviation −3.2 −5.8 −4.1 −7.0 standard deviation 1.5 1.9 1.9 2.9 
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表 2 第二阶段长期稳定性测试
Table 2. Phase II long term stability test
X/μm Y/μm X/μm Y/μm average method pairwise cycle method maximum deviation 5.6 6.9 10.6 7.4 sensor 011 minimum deviation −2.2 −3.5 −12.3 −6.9 standard deviation 1.0 1.3 1.5 1.9 maximum deviation 1.7 5.7 2.2 7.5 sensor 015 minimum deviation −1.5 −2.5 −2.0 −7.3 standard deviation 0.7 1.7 0.9 2.4
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表 3 第三阶段长期稳定性测试
Table 3. Phase III long term stability test
X/μm Y/μm X/μm Y/μm average method pairwise cycle method maximum deviation 5.9 6.1 4.5 6.5 sensor 011 minimum deviation −3.6 −4.4 −4.7 −5.6 standard deviation 1.0 1.6 1.0 1.9 maximum deviation −2.6 4.7 2.9 6.8 sensor 015 minimum deviation −2.7 −3.5 −3.5 −6.5 standard deviation 0.7 1.4 0.9 1.9
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