Influence of vacuum baking O-rings on optical properties of laser system
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摘要: 光学真空系统内的非金属材料出气会产生分子态污染，导致光学元件的透过率降低，进而会加剧激光诱导损伤，降低高功率激光装置的负载能力。提出对通光环境内的密封材料进行优选，开展热真空烘烤实验研究。结果表明，氟橡胶246出气量较小，温度对材料除气效果影响较大，且密封圈经过真空烘烤除气对光学特性影响较低，与密封圈不进行真空烘烤处理相比，紫外段平均透过率变化减少1个数量级，平均损伤密度降低了56%。该技术可应用于高功率激光装置精密洁净领域和其他精密光学洁净系统。Abstract: The outgassing of non-metallic materials in optical vacuum system will produce molecular contamination, which will lead to the decrease of transmittance of optical elements, and then aggravate laser-induced damage and reduce the load capacity of high-power laser facilities. In this paper, it is proposed to optimize the sealing materials in the laser environment, and carry out the experimental study of thermal vacuum baking. The results show that fluoroelastomer 246 has low outgassing, and temperature has great influence on the degassing effect of the material, and the vacuum baking degassing of the sealing ring has little influence on the optical characteristics. Compared with the sealing ring without vacuum baking, the average UV transmittance change decreased by 1 order of magnitude, and the average damage density decreased by 56%. This technology can be used in high-power laser facilities for precision cleaning and other optical cleaning systems.
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图 2 不同氟橡胶相对质量随时间变化关系
Figure 2. Relationship between relative mass of different FKM and time
图 4 有无真空烘烤的透过率变化对比
Figure 4. Comparison of transmittance changes with and without vacuum baking
表 1 激光装置常见密封圈材料质损率
Table 1. Mass loss rate of common sealing ring materials for laser facility
material mass loss rate/% FKM-246 0.16 FKM-26 0.32 NBR 2.5 VMQ1# 2.6 VMQ2# 16.9 
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表 2 密封圈材料规格
Table 2. Material specification of O-rings
number size (ID×CS) amount A 110 mm×4 mm 2 B 42 mm×5 mm 1 C 28 mm×5 mm 3 D 18 mm×5 mm 2
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[1] Wang Xiaodong, Shen Jun. A review of contamination-resistant antireflective sol–gel coatings[J]. Journal of Sol-Gel Science and Technology, 2012, 61(1): 206-212. doi: 10.1007/s10971-011-2615-4 [2] Cui Yun, Zhao Yuanan, Yu Hua, et al. Impact of organic contamination on laser-induced damage threshold of high reflectance coatings in vacuum[J]. Applied Surface Science, 2008, 254(18): 5990-5993. doi: 10.1016/j.apsusc.2008.03.185 [3] 朱剑涛, 刘晨, 刘天雄. 卫星真空烘烤试验方案及验证[J]. 航天器环境工程, 2018, 35(1):76-81 doi: 10.3969/j.issn.1673-1379.2018.01.014Zhu Jiantao, Liu Chen, Liu Tianxiong. The satellite vacuum bakeout test scheme with validation[J]. Spacecraft Environment Engineering, 2018, 35(1): 76-81 doi: 10.3969/j.issn.1673-1379.2018.01.014 [4] 于钱, 臧卫国, 杨晓宁, 等. 硅橡胶电缆材料真空烘烤除气参数实验分析方法[J]. 环境技术, 2015, 33(3):25-28,53 doi: 10.3969/j.issn.1004-7204.2015.03.009Yu Qian, Zang Weiguo, Yang Xiaoning, et al. Test method study of silicone rubber cable baking outgassing parameter in vacuum environment[J]. Environmental Technology, 2015, 33(3): 25-28,53 doi: 10.3969/j.issn.1004-7204.2015.03.009 [5] 袁翠萍, 张辰华, 赵如琳, 等. 航天器电缆网热真空烘烤特性研究[J]. 电子工艺技术, 2018, 39(1):37-39,42 doi: 10.14176/j.issn.1001-3474.2018.01.011Yuan Cuiping, Zhang Chenhua, Zhao Rulin, et al. Characteristic study on thermal vacuum baking test of spacecraft harness[J]. Electronics Process Technology, 2018, 39(1): 37-39,42 doi: 10.14176/j.issn.1001-3474.2018.01.011 [6] 焦子龙, 姜利祥, 孙继鹏, 等. 空间光学系统真空热试验污染控制经验综述[J]. 航天器环境工程, 2015, 32(4):445-450 doi: 10.3969/j.issn.1673-1379.2015.04.020Jiao Zilong, Jiang Lixiang, Sun Jipeng, et al. Overview of contamination controls for space-based optical systems in thermal vacuum tests[J]. Spacecraft Environment Engineering, 2015, 32(4): 445-450 doi: 10.3969/j.issn.1673-1379.2015.04.020 [7] 焦子龙, 姜利祥, 孙继鹏, 等. 星载激光雷达系统污染增强损伤效应及防护试验研究[J]. 航天器环境工程, 2017, 34(4):419-423 doi: 10.3969/j.issn.1673-1379.2017.04.014Jiao Zilong, Jiang Lixiang, Sun Jipeng, et al. Tests for contamination enhanced and laser-induced damage in spaceborne lidar system and its prevention[J]. Spacecraft Environment Engineering, 2017, 34(4): 419-423 doi: 10.3969/j.issn.1673-1379.2017.04.014 [8] 张雪芹, 尚忠, 于建波. 密封微电子器件真空烘烤工艺研究[J]. 电子与封装, 2017, 17(1):6-9 doi: 10.16257/j.cnki.1681-1070.2017.0002Zhang Xueqin, Shang Zhong, Yu Jianbo. Studies of vacuum bakeout process for hermetic microelectronic devices[J]. Electronics & Packaging, 2017, 17(1): 6-9 doi: 10.16257/j.cnki.1681-1070.2017.0002 [9] 代彦伟, 肖梅, 张晓兵, 等. 基于四极质谱仪O形氟橡胶圈的放气研究[J]. 真空与低温, 2016, 22(3):170-172 doi: 10.3969/j.issn.1006-7086.2016.03.011Dai Yanwei, Xiao Mei, Zhang Xiaobing, et al. The deflated research on Viton O-ring based on using quadrupole mass spectrometer[J]. Vacuum & Cryogenics, 2016, 22(3): 170-172 doi: 10.3969/j.issn.1006-7086.2016.03.011 [10] Pryatel J A, Gourdin W H, Frieders S C, et al. Cleaning practices and facilities for the national ignition facility (NIF)[C]//Proceedings of SPIE 9237, Laser-Induced Damage in Optical Materials. 2014: 92372H. [11] Pryatel J A, Gourdin W H, Hampton G J, et al. Qualification of materials for applications in high fluence lasers[C]//Proceedings of SPIE 6403, Laser-Induced Damage in Optical Materials. 2007: 640329. [12] QJ 1558B-2016, 真空条件下材料挥发性能测试方法[S]QJ 1558B-2016, Test method for materials outgassing performance in vacuum[S] -
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