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孔形对基于硅微通道阵列的CsI:Tl闪烁屏性能影响的模拟

赵子锋 王国政 郝子恒 张妮 戈钧 杨继凯

赵子锋, 王国政, 郝子恒, 等. 孔形对基于硅微通道阵列的CsI:Tl闪烁屏性能影响的模拟[J]. 强激光与粒子束. doi: 10.11884/HPLPB202436.230424
引用本文: 赵子锋, 王国政, 郝子恒, 等. 孔形对基于硅微通道阵列的CsI:Tl闪烁屏性能影响的模拟[J]. 强激光与粒子束. doi: 10.11884/HPLPB202436.230424
Zhao Zifeng, Wang Guozheng, Hao Ziheng, et al. Simulation of the effect of hole shape on performance of CsI: Tl scintillation screens based on silicon microchannel arrays[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202436.230424
Citation: Zhao Zifeng, Wang Guozheng, Hao Ziheng, et al. Simulation of the effect of hole shape on performance of CsI: Tl scintillation screens based on silicon microchannel arrays[J]. High Power Laser and Particle Beams. doi: 10.11884/HPLPB202436.230424

孔形对基于硅微通道阵列的CsI:Tl闪烁屏性能影响的模拟

doi: 10.11884/HPLPB202436.230424
基金项目: 国家自然基金科技项目(52502023),吉林省科技厅项目(20200201077JC),吉林省教育厅项目(JJKH20210800KJ、JJKH20220726KJ),重庆自然科学基金项目(CSTB2022NSCQ-MSX0751)
详细信息
    作者简介:

    赵子锋,zzf_dl@sohu.com

    通讯作者:

    王国政,wguozheng@163.com

  • 中图分类号: TP391.41;O434.19

Simulation of the effect of hole shape on performance of CsI: Tl scintillation screens based on silicon microchannel arrays

  • 摘要: 使用Geant4程序模拟了微孔形状对基于硅微通道阵列的CsI:Tl像素化X射线闪烁屏性能的影响。模拟的闪烁屏性能参数包括:闪烁光子数、底光输出、传输效率、n次全反射占比、调制传递函数(MTF)与空间分辨率的关系。模拟过程中设定微孔的形状分别为方形和圆形,两种孔形的微通道阵列周期相同,均为10 μm。模拟结果显示:方形微孔的闪烁光子数优于圆形微孔,闪烁光子数正比于微孔横截面积;闪烁屏厚度小于400 μm时,方形微孔的底光输出优于圆形微孔,厚度大于400 μm时,圆形微孔的底光输出优于方形微孔;圆形微孔的传输效率优于方形微孔;厚度为40和200 μm的方形微孔闪烁屏空间分辨率优于相同厚度的圆形微孔闪烁屏。制备了方形微孔的CsI:Tl闪烁屏样品,测量了其MTF与空间分辨率的关系,当MTF为0.1时,空间分辨率为22.6 lp/mm。
  • 图  1  X射线探测示意图

    Figure  1.  Schematic diagram of X-ray detection

    图  2  两种基于SMA的CsI:Tl闪烁屏结构示意图

    Figure  2.  Schematic structure of two silicon microchannel array (SMA) based CsI:Tl scintillation screens

    图  3  基于SMA的CsI:Tl闪烁屏三维几何模型

    Figure  3.  SMA-based 3D geometric models of CsI:Tl scintillation screen

    图  4  产生的闪烁光子数随闪烁屏厚度的变化

    Figure  4.  Variation of the number of generated scintillation photons with the thickness of the scintillation screen

    图  5  闪烁光子数随X射线能量的变化

    Figure  5.  Variation of scintillation photon number with X-ray energy

    图  6  BLO与闪烁屏厚度的关系

    Figure  6.  Relationship between BLO and thickness of scintillation screen

    图  7  传输效率与闪烁屏厚度的关系

    Figure  7.  Transmission efficiency versus scintillation screen thickness

    图  8  n次全反射的闪烁光子数占闪烁光子总数的比例

    Figure  8.  Number of scintillating photons subjected to n total reflections as a proportion of the total number of scintillating photons

    图  9  CsI:Tl闪烁屏的MTF与空间分辨率的关系

    Figure  9.  MTF versus spatial resolution for CsI:Tl flicker screens

    图  10  SMA基体SEM图

    Figure  10.  SEM image of SMA

    图  11  X射线成像装置示意图

    Figure  11.  Schematic diagram of X ray equipment

    图  12  刃边法的数据处理

    Figure  12.  Data processing of edge method

    图  13  样品硅片的MTF与空间分辨率的关系

    Figure  13.  Relationship between MTF and spatial resolution of sample wafers

  • [1] Nagarkar V V, Gupta T K, Miller S R, et al. Structured CsI(Tl) scintillators for X-ray imaging applications[J]. IEEE Transactions on Nuclear Science, 1998, 45(3): 492-496. doi: 10.1109/23.682433
    [2] 王双双, 刘春阳, 王国政, 等. X射线能量对基于宏孔硅的X射线CsI(Tl)闪烁屏的影响[J]. 激光与光电子学进展, 2022, 59:1734001

    Wang Shuangshuang, Liu Chunyang, Wang Guozheng, et al. Effect of X-ray energy on X-ray CsI(Tl) scintillation screen based on macroporous silicon[J]. Laser & Optoelectronics Progress, 2022, 59: 1734001
    [3] Miller S R, Gaysinskiy V, Shestakova I, et al. Recent advances in columnar CsI(Tl) scintillator screens[C]//Proceedings of SPIE 5923, Penetrating Radiation Systems and Applications VII. 2005: 59230F.
    [4] 顾牡, 张敏, 刘小林, 等. 微柱状CsI闪烁薄膜热蒸发生长工艺[J]. 强激光与粒子束, 2010, 22(2):374-378 doi: 10.3788/HPLPB20102202.0374

    Gu Mu, Zhang Min, Liu Xiaolin, et al. Growth process of CsI scintillating films with micro-columnar structure by thermal evaporation[J]. High Power Laser and Particle Beams, 2010, 22(2): 374-378 doi: 10.3788/HPLPB20102202.0374
    [5] 郭金川, 牛憨笨, 周彬. 晶柱粘连对CsI: Na转换屏分辨特性的影响[J]. 光子学报, 2001, 30(10):1214-1217

    Guo Jinchuan, Niu Hanben, Zhou Bin. Influence of conglutination of CsI: Na columns on the resolution properties[J]. Acta Photonica Sinica, 2001, 30(10): 1214-1217
    [6] 江孝国, 王伟, 王婉丽. X光作用下CsI: Tl晶体的转换效率研究[J]. 强激光与粒子束, 2005, 17(2):203-205

    Jiang Xiaoguo, Wang Wei, Wang Wanli. Conversion efficiency of the CsI: Tl crystal excited by X-ray[J]. High Power Laser and Particle Beams, 2005, 17(2): 203-205
    [7] 袁云龙. 基于宏孔硅的X射线闪烁屏性能研究[D]. 长春: 长春理工大学, 2020: 41-47

    Yuan Yunlong. Research on X-ray scintillation screen based on macroporous silicon[D]. Changchun: Changchun University of Science and Technology, 2020: 41-47
    [8] Li ZhuXin, Michelet C, Incerti S, et al. Implementation of the EPICS2017 database for photons in Geant4[J]. Physica Medica, 2022, 95: 94-115. doi: 10.1016/j.ejmp.2022.01.008
    [9] Allison J, Amako K, Apostolakis J, et al. Geant4 developments and applications[J]. IEEE Transactions on Nuclear Science, 2006, 53(1): 270-278. doi: 10.1109/TNS.2006.869826
    [10] Hormozan Y, Yun S H, Svenonius O, et al. Towards high-resolution X-ray imaging using a structured scintillator[J]. IEEE Transactions on Nuclear Science, 2012, 59(1): 19-23. doi: 10.1109/TNS.2011.2177477
    [11] Kleimann P, Linnros J, Fröjdh C, et al. An X-ray imaging pixel detector based on scintillator filled pores in a silicon matrix[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2001, 460(1): 15-19.
    [12] Cha B K, Lee D H, Kim B, et al. High-resolution X-ray imaging based on pixel-structured CsI: Tl scintillating screens for indirect X-ray image sensors[J]. Journal of the Korean Physical Society, 2011, 59(6): 3670-3673.
    [13] 陈奇, 王国政, 王蓟, 等. 光电化学腐蚀法制备高长径比硅微通道[J]. 半导体技术, 2018, 43(3):216-220

    Chen Qi, Wang Guozheng, Wang Ji, et al. Fabrication of high aspect ratio silicon microchannel by photo-electrochemical etching[J]. Semiconductor Technology, 2018, 43(3): 216-220
    [14] Chen Hui, Gu Mu, Liu Xiaolin, et al. Simulated performances of pixelated CsI(Tl) scintillation screens with different micro-column shapes and array structures in X-ray imaging[J]. Scientific Reports, 2018, 8: 16819. doi: 10.1038/s41598-018-34852-3
    [15] 丁富荣, 班勇, 夏宗璜. 辐射物理[M]. 北京: 北京大学出版社, 2004: 24-28

    Ding Furong, Ban Yong, Xia Zonghuang. Radiation physics[M]. Beijing: Peking University Press, 2004: 24-28
    [16] Physical Measurements Laboratory. X-ray form factor, attenuation, and scattering tables[DB/OL]. https://www.nist.gov/pml/x-ray-form-factor-attenuation-and-scattering-tables.
    [17] Samei E, Flynn M J, Reimann D A. A method for measuring the presampled MTF of digital radiographic systems using an edge test device[J]. Medical Physics, 1998, 25(1): 102-113. doi: 10.1118/1.598165
    [18] 贾清刚, 王东明, 安洪振, 等. 基于蒙特卡洛方法的闪烁光纤阵列空间分辨率模拟[J]. 中国科学:技术科学, 2013, 43(12):1432-1438 doi: 10.1360/ze2013-43-12-1432

    Jia Qinggang, Wang Dongming, An Hongzhen, et al. Simulation of spatial resolution of scintillating fiber array based on Monte Carlo method[J]. SCIENTIA SINICA Technologica, 2013, 43(12): 1432-1438 doi: 10.1360/ze2013-43-12-1432
    [19] Simon M, Engel K J, Menser B, et al. X-ray imaging performance of scintillator-filled silicon pore arrays[J]. Medical Physics, 2008, 35(3): 968-981. doi: 10.1118/1.2839441
    [20] 肖飞虎. 硅基微结构制作及其在X射线探测器研制中的应用研究[D]. 深圳: 深圳大学, 2017

    Xiao Feihu. Study on fabrication of silicon-based microstructures and its application in the X-ray detectors[D]. Shenzhen: Shenzhen University, 2017
    [21] 王宇, 周燕萍, 李茂林, 等. 用于垂直腔面发射激光器的GaAs/AlGaAs的ICP刻蚀工艺研究[J]. 中国激光, 2020, 47:0401005 doi: 10.3788/CJL202047.0401005

    Wang Yu, Zhou Yanping, Li Maolin, et al. ICP etching process of GaAs/AlGaAs for vertical-cavity surface-emitting lasers[J]. Chinese Journal of Lasers, 2020, 47: 0401005 doi: 10.3788/CJL202047.0401005
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出版历程
  • 收稿日期:  2023-12-01
  • 修回日期:  2024-01-24
  • 录用日期:  2024-01-22
  • 网络出版日期:  2024-02-05

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