Real-time monitoring and controlling for large annular lapping
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摘要: 为解决大型激光驱动器建设中的关键工艺大型精密环形抛光技术一直存在着的控制困难、精度收敛不稳定的难题，分析了环形抛光加工中面形调整控制机理和本质，找到了传统调节控制和判断方法中的缺陷，提出了一种对环抛机面形变化基本实时的离线监测方法。这种监测方法具有结构简单、检测判断时间短和面形变化反应直观的优点。通过建立实验监测装置和实际加工验证，获得了较好的面形趋势判断和实时控制效果。Abstract: In large aperture planar optics fabrication, the key process, large precision annular lapping, is difficult to control. The fabricating principle and essence of annular lapping were discussed in this paper. The disadvantages of conventional controlling method were figured out and a real-time off-line monitoring method was proposed. The new method features simple structure, fast measuring and judgment, and can response directly to the change of surface figures. Good results of real-time controlling and surface converging were obtained through experimental validation.
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Key words:
- optical fabrication /
- surface figure monitoring /
- annular lapping /
- key parameter
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