Soft X-ray KBA microscope resolution and its influencing factors
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摘要: 为了对KBA显微镜的分辨能力进行准确计算，对KBA显微镜的分辨力和影响因素进行了研究，分析了衍射效应、几何像差、面形误差和粗糙度等因素对分辨力的影响，以此为基础建立了KBA显微镜的分辨力计算模型，并模拟了KBA显微镜的分辨力与视场的关系。用KBA显微镜获得了2.5 keV能量的X射线成像结果，中心视场范围的分辨力约为6 m。通过实验结果与模型模拟的对比，可得建立的模型对KBA显微镜分辨力与视场尺寸的关系的描述与实际测试的结果基本符合，并对不完善之处进行了分析。Abstract: The paper investigates the resolution of soft X-ray KBA microscope and analyzes its influencing factors, including diffractive effect, geometrical aberration, slope error and surface roughness of specula. A calculation model of the KBA microscope is obtained according to these analyses. A 2.5 keV X-ray imaging experiment is performed and the resolution agrees with the simulated data of the model in large visual field. The incompleteness of this model is also analyzed.
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Key words:
- kba microscope /
- resolution /
- geometrical aberration /
- diffractive effect /
- surface roughness
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