Abstract: The purpose of this work is to simulate 6 MV Varian Truebeam linac dosimeter characteristics using Monte Carlo method and to investigate the availability of phase space file and the accuracy of the simulation. With the phase space file at linac window supplied by Varian to be a source, the patient-dependent part was simulated. Dose distributions in a water phantom with a 10 cm10 cm field were calculated and compared with measured data for validation. Evident time reduction was obtained from 4-5 h which a whole simulation cost on the same computer to around 48 minutes. Good agreement between simulations and measurements in water was observed. Dose differences are less than 3% for depth doses in build-up region and also for dose profiles inside the 80% field size, and the effect in penumbra is good. It demonstrate that the simulation using existing phase space file as the EGSnrc source is efficient. Dose differences between calculated data and measured data could meet the requirements for dose calculation.