Effect of RF power on properties of diamond-like carbon films
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摘要: 在不同射频功率条件下，实验研究了射频等离子体化学气相沉积类金刚石薄膜的金刚石相分数、光学常数和硬度。利用Raman光谱仪、椭圆偏振仪、数字式显微硬度计分别测试了不同条件下单层类金刚石薄膜的金刚石相分数、光学常数和硬度。实验表明，随着功率的增加，金刚石相的相对分数减少，薄膜的折射率先减小再增加然后减小，射频功率大于910 W时，沉积速率急剧增大。而薄膜的硬度先增加后减小，在射频功率为860 W处获得最大值。
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关键词:
- 射频功率 /
- 射频等离子体化学气相沉积 /
- 类金刚石薄膜 /
- Raman光谱
Abstract: The diamond phase fraction, optical constant and hardness of diamond-like carbon thin films deposited at different radio frequency powers by radio frequency plasma chemical vapor deposition have been investigated. The diamond phase fraction, optical constant and hardness of single-layered thin films at different radio frequency powers have been measured by using Raman spectroscopy, spectroscopic ellipsometer and micro-sclerometer, respectively. With the increase of radio frequency power, the fraction of diamond phase decreases and the growth rate of films increases, especially when the power is above 910 W. The refractive index of films decreases in the range of 660-860 W and 910-960 W and increases between 860 W and 910 W. The hardness increases and then decreases between 660 W and 960 W with its maximum at 860 W. -
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