Abstract: The subwavelength semiconductor sphere arrays in THz range are simulated with T-matrix method. Based on the numerical results, their optical properties are also discussed. The properties of semiconductor surface plasmon can be tailored within the terahertz frequency range through doping. We take the semiconductor InSb as an example and adopt Drude model for simulating single subwavelength sphere and arrays with two or more subwavelength spheres. In addition, we discuss the effects of some parameters on the properties of sphere arrays, such as the sphere radius, periodicity of the array, the number of spheres in the array and the polarization direction of the incident wave. The result gives a preliminary comprehension on the optical properties of subwavelength semiconductor sphere arrays and provides some theoretical help for their potential applications.