Application of picosecond laser processing to target fabrication in equation of state experiments
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摘要: 介绍了激光状态方程靶中金属薄膜台阶的切割方法。采用皮秒激光加工技术切割了宽度百m量级的金属薄膜台阶，研究了金属薄膜台阶宽度控制的方法，讨论了切割过程中产生热效应的因素，优化了激光加工参数。实验加工中，采用加工的参数：功率为0.5 W，脉宽10 ps,波长355 nm,扫描速率为100 mm/s,获得了宽度400 m和120 m的金属薄膜。测量结果表明，金属薄膜的宽度能精确控制，切割后金属薄膜表面质量能保持切割前的质量。Abstract: The fabrication of metal film steps used in equation of state experiment targets was investigated. The metal film step of hundreds of microns width was cut by picosecond laser processing technology. The factors of generating heat effect in the processing were analyzed. The processing parameters were as follows: power 0.5 W, pulse width 10 ps, wavelength 355 nm, and scanning speed 100 mm/s. Two metal films of 400 and 120 microns width were obtained in the experiment. The measurement results show that the width of metal film can be precisely controlled and the quality of metal film surface before and after cutting was the same.
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