Application of picosecond laser processing to target fabrication in equation of state experiments
-
摘要: 介绍了激光状态方程靶中金属薄膜台阶的切割方法。采用皮秒激光加工技术切割了宽度百m量级的金属薄膜台阶，研究了金属薄膜台阶宽度控制的方法，讨论了切割过程中产生热效应的因素，优化了激光加工参数。实验加工中，采用加工的参数：功率为0.5 W，脉宽10 ps,波长355 nm,扫描速率为100 mm/s,获得了宽度400 m和120 m的金属薄膜。测量结果表明，金属薄膜的宽度能精确控制，切割后金属薄膜表面质量能保持切割前的质量。Abstract: The fabrication of metal film steps used in equation of state experiment targets was investigated. The metal film step of hundreds of microns width was cut by picosecond laser processing technology. The factors of generating heat effect in the processing were analyzed. The processing parameters were as follows: power 0.5 W, pulse width 10 ps, wavelength 355 nm, and scanning speed 100 mm/s. Two metal films of 400 and 120 microns width were obtained in the experiment. The measurement results show that the width of metal film can be precisely controlled and the quality of metal film surface before and after cutting was the same.
期刊类型引用(6)
1. 买里克古丽·艾合买提，达娜·加山尔，杜力坤·苏来曼，塔西买提·玉苏甫. 超宽调谐（2.6～5μm）中红外皮秒脉冲激光的研究. 新疆师范大学学报(自然科学版). 2024(04): 20-25 . 
百度学术2. 谢志勇，叶君建，贾果，方智恒，贺芝宇，舒桦，涂昱淳，黄秀光，傅思祖. Al/Ta-Nb合金阻抗匹配靶的制备工艺研究. 强激光与粒子束. 2024(12): 40-45 . 本站查看3. 王金川，何平，曹海霞，汪丹，王君涛，周唐建，尚建力，高清松. 高功率平面波导皮秒激光放大器. 中国激光. 2023(02): 49-55 . 百度学术4. 王金川，李密，杜佳林，汪丹，李腾龙，王君涛，周唐建，尚建力，高清松. 1.8 mJ高倍率Nd:YAG板条皮秒激光放大器. 强激光与粒子束. 2022(06): 5-11 . 本站查看5. 刘盛刚，陶天炯，马鹤立，翁继东，王翔，李泽仁. 基于白光频域干涉的大台阶高度测量方法. 强激光与粒子束. 2015(09): 50-54 . 本站查看6. 韩克祯，李倞，宁建，侯佳，张百涛，何京良. 板条放大器同步泵浦的宽调谐MgO:PPLN中红外光参量振荡器（英文）. 强激光与粒子束. 2015(12): 48-53 . 本站查看其他类型引用(1)
-
点击查看大图
计量
- 文章访问数: 1398
- HTML全文浏览量: 308
- PDF下载量: 368
- 被引次数: 7
下载:
