柔性变焦镜的理论计算和设计
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摘要: 设计了由压电陶瓷施压的柔性变焦镜的结构。根据弹性力学建立了相应的数学模型，采用有限元法计算了镜面受力的挠变形值。当柔性变焦镜最大挠度为9μm时，镜面的曲率半径从610mm变至590mm，此时采用环形筋条结构的反射镜镜面和理想球面的面形偏差PV值仅为1μm，面形相对偏差为0.3%。Abstract: A new style of flexible focus variable mirror which is forced by piezoelectric ceramic is designed in this paper. Finite elements method is used to calculate the mirrors deflection and the deviation of surface shape is quoted to evaluate the mirrors imaging quality. When the maximum deflection is 9μ m, the radius of mirrors curvature is varying from 610mm to 590mm and the PV val ue of deviation is 1μm, the relative deviation of surface shape is 0.3%．
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