灵敏度控制思想在主动膜系设计中的快速实现算法
Fast realization algorithms of sensitivity control concept in active design of multilayer optical coatings
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摘要: 基于斜入射薄膜制备实践中镀膜误差对光谱性能的严重退化影响的认识，提出了一种基于灵敏度控制思想的主动膜系设计方法。在深入分析了镀膜中膜层结构参数误差的分布规律的基础上，运用膜系光谱系数关于膜层参数的导数计算的解析模型，建立了膜系灵敏度的定量计算模型和快速实现算法。以一45°入射高精度消偏振增透膜的设计实验为例，探讨了灵敏度控制思想在膜系设计中的可行性、快速性和有效性。结果表明，这一新型设计方法不会显著增加程序时间消耗，能获得具有良好可镀制性能的薄膜，对于正入射和宽角度入射膜同样适用，而且可以避免昂贵的失败试镀和采样，有助于缩短新薄膜的生产周期，特别是对于高精度斜入射薄膜的重复性制备具有重要意义。Abstract: Deposition errors of nonnormal incident optical coatings have a serious degradation impact on their spectral characteristics according to practical preparation experiences. A novel active multilayer optical coating design method based on sensitivity control concept is put forward to minimize the impact. The distribution law of deposited layer parameters errors is thoroughly analyzed under available production environment. Precise calculation model of multilayer optical coating’s sensitivity is analytically established by use of the derivatives calculation model of multilayer system’s spectral coefficients with respect to layer parameters. Numerical design experiments in a non-polarization antireflection coating with 45° light incidence are operated to explore and verify the feasibility,
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