计算机控制光学表面成形中大规模驻留时间求解
Large-scale dwell time algorithm for computer controlled optical surfacing
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摘要: 采用基于稀疏矩阵的大规模非负最小二乘法，对大口径、微浮雕结构光学元件加工中的驻留时间进行了分析与求解，并对该算法开展了正则化研究。仿真结果表明:与传统非负最小二乘法相比，基于稀疏矩阵的大规模非负最小二乘法精度高、效率快。采用该算法仿真加工平均振幅为1.177 6倍波长的大口径、微浮雕结构光学元件，误差面形均方根收敛至0.067倍波长。
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关键词:
- 计算机控制光学表面成形 /
- 驻留时间 /
- 大规模非负最小二乘法 /
- 正则化 /
- 面形精度
Abstract: This paper uses a non-negative least-squares method based on sparse matrix, to solve the dwell time in computer controlled optical surfacing (CCOS) of optical elements with large diameter and microstructure, and the regularization of the method is researched. The simulation results reveal that the large-scale non-negative least-squares method based on sparse matrix has higher accuracy and efficiency, in contrast with the traditional non-negative least-squares method. The RMS of surface residual error converges to 0.067 wavelength, when the method is used to simulate the manufacturing of an optical workpiece with large diameter, microstructures and average surface amplitude of 1.177 6 wavelengths. -
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