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RSS2016 Vol. 28, No. 06
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2016,
28: 064101.
doi: 10.11884/HPLPB201628.064101
Abstract:
In order to analyze sensing mechanisms of bulk acoustic wave(BAW) force sensors based on the stress/strain effects and calculate their sensitivity accurately, a calculus-like analysis method is proposed. Drawing on the principles of calculus, the met...
In order to analyze sensing mechanisms of bulk acoustic wave(BAW) force sensors based on the stress/strain effects and calculate their sensitivity accurately, a calculus-like analysis method is proposed. Drawing on the principles of calculus, the met...
2016,
28: 064102.
doi: 10.11884/HPLPB201628.064102
Abstract:
SU-8 thick resist lithography has become the mainstream technology for structures with high aspect ratio in the micro-electro-mechanical system (MEMS) and integrated circuits (ICs). So as to replace expensive and time-consuming lithographic experimen...
SU-8 thick resist lithography has become the mainstream technology for structures with high aspect ratio in the micro-electro-mechanical system (MEMS) and integrated circuits (ICs). So as to replace expensive and time-consuming lithographic experimen...
2016,
28: 064103.
doi: 10.11884/HPLPB201628.064103
Abstract:
In this paper, MEMS vector hydrophone is proposed to apply in submerged buoy system, and a large number of experiments are done to verify its feasibility. The MEMS vector hydrophone, a kind of underwater acoustic sensor, has lots of advantages, such ...
In this paper, MEMS vector hydrophone is proposed to apply in submerged buoy system, and a large number of experiments are done to verify its feasibility. The MEMS vector hydrophone, a kind of underwater acoustic sensor, has lots of advantages, such ...
2016,
28: 064104.
doi: 10.11884/HPLPB201628.064104
Abstract:
In order to remove the undesired DC offset of integral signal, a modified integral algorithm based on the Single Moving Average Method is proposed. In this algorithm, the N samples during one cycle are collected as a set, and the average value of the...
In order to remove the undesired DC offset of integral signal, a modified integral algorithm based on the Single Moving Average Method is proposed. In this algorithm, the N samples during one cycle are collected as a set, and the average value of the...
2016,
28: 064105.
doi: 10.11884/HPLPB201628.064105
Abstract:
To achieve intellectualization and miniaturization of fuze, a novel high-g dual-threshold MEMS (Micro-Electro-Mechanical Systems) inertial switch has been designed and simulated under the premise of ensuring its service safety and launching reliabili...
To achieve intellectualization and miniaturization of fuze, a novel high-g dual-threshold MEMS (Micro-Electro-Mechanical Systems) inertial switch has been designed and simulated under the premise of ensuring its service safety and launching reliabili...
2016,
28: 064106.
doi: 10.11884/HPLPB201628.064106
Abstract:
The micro-opto-electro-mechanical systems (MOEMS) mirror is an important optical device in laser display, light beam scanning, and adaptive optics applications. MOEMS mirrors are mostly attractive electrostatically actuated in the reported literature...
The micro-opto-electro-mechanical systems (MOEMS) mirror is an important optical device in laser display, light beam scanning, and adaptive optics applications. MOEMS mirrors are mostly attractive electrostatically actuated in the reported literature...
2016,
28: 064107.
doi: 10.11884/HPLPB201628.064107
Abstract:
By scanning electrochemical microscopy ( SECM ) and traditional electrochemical method, the effect of loading potential variation on direct methanol fuel cell ( DMFC ) anode performance was studied. When the anode was loaded for 2 h at different pote...
By scanning electrochemical microscopy ( SECM ) and traditional electrochemical method, the effect of loading potential variation on direct methanol fuel cell ( DMFC ) anode performance was studied. When the anode was loaded for 2 h at different pote...
2016,
28: 064108.
doi: 10.11884/HPLPB201628.064108
Abstract:
The self-heating effect of the capacitive RF MEMS switch is caused by increasing incident power of the RF signal, which leads to deformation of the membrane. Thus, the air gap of the switch is changed. Eventually the drift of the actuation voltage of...
The self-heating effect of the capacitive RF MEMS switch is caused by increasing incident power of the RF signal, which leads to deformation of the membrane. Thus, the air gap of the switch is changed. Eventually the drift of the actuation voltage of...
2016,
28: 064109.
doi: 10.11884/HPLPB201628.064109
Abstract:
In this paper, the response surface methodology(RSM) is applied to optimizing the operating conditions of silicon etching for pressure sensor fabrication. Three operating parameters, the temperature, the KOH concentration and the etching time are con...
In this paper, the response surface methodology(RSM) is applied to optimizing the operating conditions of silicon etching for pressure sensor fabrication. Three operating parameters, the temperature, the KOH concentration and the etching time are con...
2016,
28: 064110.
doi: 10.11884/HPLPB201628.064110
Abstract:
An endoscope system and its corresponding image analysis methods are proposed to implement the assembly quality control of a kind of Interferometric Fiber Optic Gyroscope (IFOG). Two industrial endoscopes with diameter of 1mm and 2.4 mm are utilized ...
An endoscope system and its corresponding image analysis methods are proposed to implement the assembly quality control of a kind of Interferometric Fiber Optic Gyroscope (IFOG). Two industrial endoscopes with diameter of 1mm and 2.4 mm are utilized ...
2016,
28: 064111.
doi: 10.11884/HPLPB201628.064111
Abstract:
The electroforming microfluidic chip mould faces the problem of uneven thickness,which influences the dimensional accuracy and performance of the mould, and increases the production cost. With the aim of fabricating a microfluidic chip mould with uni...
The electroforming microfluidic chip mould faces the problem of uneven thickness,which influences the dimensional accuracy and performance of the mould, and increases the production cost. With the aim of fabricating a microfluidic chip mould with uni...
2016,
28: 064113.
doi: 10.11884/HPLPB201628.064113
Abstract:
Pressure resistance is an essential characteristic of microspheres which has applications in various fields but the manual measurement of it is laborious and inaccurate. The method of automatic measurement using image detection to discriminate micros...
Pressure resistance is an essential characteristic of microspheres which has applications in various fields but the manual measurement of it is laborious and inaccurate. The method of automatic measurement using image detection to discriminate micros...
2016,
28: 064114.
doi: 10.11884/HPLPB201628.064114
Abstract:
In this paper, we present a simplified calibration and compensation method that enables the piezoresistive pressure sensor to function with high resolution in wide range of ambient temperature. Normally, extensive work in calibration and compensation...
In this paper, we present a simplified calibration and compensation method that enables the piezoresistive pressure sensor to function with high resolution in wide range of ambient temperature. Normally, extensive work in calibration and compensation...
2016,
28: 064115.
doi: 10.11884/HPLPB201628.064115
Abstract:
A multifunction sensor based on nano-polysilicon thin film resistors which consists of pressure sensor and acceleration sensor is described. The two Wheatstone bridges consisting of piezoresistors are designed on the surface of square silicon membran...
A multifunction sensor based on nano-polysilicon thin film resistors which consists of pressure sensor and acceleration sensor is described. The two Wheatstone bridges consisting of piezoresistors are designed on the surface of square silicon membran...
2016,
28: 064116.
doi: 10.11884/HPLPB201628.064116
Abstract:
For effective use of graphene and conducting polymer, the composite films of laser scribed graphene (LSG) combined with poly(3,4-ethylenedioxythiophene) (PEDOT) are prepared with a facile laser scribing technology. Each component in the hybrid films ...
For effective use of graphene and conducting polymer, the composite films of laser scribed graphene (LSG) combined with poly(3,4-ethylenedioxythiophene) (PEDOT) are prepared with a facile laser scribing technology. Each component in the hybrid films ...
2016,
28: 064117.
doi: 10.11884/HPLPB201628.064117
Abstract:
The liquid droplet is usually adopted as the vehicle to pick micro-objects during micromanipulation tasks, and the conical manipulation probe is constantly employed as the capillary micromanipulation tool. We focus on investigations on water droplet ...
The liquid droplet is usually adopted as the vehicle to pick micro-objects during micromanipulation tasks, and the conical manipulation probe is constantly employed as the capillary micromanipulation tool. We focus on investigations on water droplet ...
2016,
28: 064118.
doi: 10.11884/HPLPB201628.064118
Abstract:
In ultraviolet induced nanoparticle colloid jet machining, the nanoparticle colloid microjet is used to effectively remove the material of the workpiece surface. A computational fluid dynamic model for vertical non-submerged jet is established to inv...
In ultraviolet induced nanoparticle colloid jet machining, the nanoparticle colloid microjet is used to effectively remove the material of the workpiece surface. A computational fluid dynamic model for vertical non-submerged jet is established to inv...
2016,
28: 064119.
doi: 10.11884/HPLPB201628.064119
Abstract:
A quartz tuning fork (QTF) micro-resonant temperature sensor which employs the shifting frequency corresponding to temperature is developed for high performance temperature measurement. The sensor is designed by the theoretical analysis, and the fini...
A quartz tuning fork (QTF) micro-resonant temperature sensor which employs the shifting frequency corresponding to temperature is developed for high performance temperature measurement. The sensor is designed by the theoretical analysis, and the fini...
2016,
28: 064120.
doi: 10.11884/HPLPB201628.064120
Abstract:
In this paper, the polystyrene/nano-silica composite particles were prepared and characterized according to the following steps. First, the nano-silica particles were pretreated with the surfactants under ultrasonic field. Secondly, the dispersion po...
In this paper, the polystyrene/nano-silica composite particles were prepared and characterized according to the following steps. First, the nano-silica particles were pretreated with the surfactants under ultrasonic field. Secondly, the dispersion po...
2016,
28: 064121.
doi: 10.11884/HPLPB201628.064121
Abstract:
The ring shaped resonator is a typical structure which is widely applied in MEMS resonator study. Elliptic mode is the basic in-plane vibration mode of ring resonator. This paper presents the numerical analysis of anchor effect in the elliptic mode r...
The ring shaped resonator is a typical structure which is widely applied in MEMS resonator study. Elliptic mode is the basic in-plane vibration mode of ring resonator. This paper presents the numerical analysis of anchor effect in the elliptic mode r...
2016,
28: 064122.
doi: 10.11884/HPLPB201628.064122
Abstract:
In order to separate the permanent gases from low carbon hydrocarbons, a gas chromatography (GC) column packed with porapak Q as stationary phase was fabricated based on MEMS technology. In this work, the channels on the glass wafer and the silicon w...
In order to separate the permanent gases from low carbon hydrocarbons, a gas chromatography (GC) column packed with porapak Q as stationary phase was fabricated based on MEMS technology. In this work, the channels on the glass wafer and the silicon w...
2016,
28: 064123.
doi: 10.11884/HPLPB201628.064123
Abstract:
Dimension uncertainty inevitably occurs in almost every fabrication of micro structure due to its small size and uniformity of material. The dimension error, however, will result in the asymmetry of the sensitive structure. The unsymmetrical structur...
Dimension uncertainty inevitably occurs in almost every fabrication of micro structure due to its small size and uniformity of material. The dimension error, however, will result in the asymmetry of the sensitive structure. The unsymmetrical structur...
2016,
28: 064124.
doi: 10.11884/HPLPB201628.064124
Abstract:
SU-8 negative photoresist has wide applications due to its excellent properties, such as good mechanical property, bio-compatibility and thermal stability. Nickel is often employed in MEMS devices due to its good mechanical property and chemical resi...
SU-8 negative photoresist has wide applications due to its excellent properties, such as good mechanical property, bio-compatibility and thermal stability. Nickel is often employed in MEMS devices due to its good mechanical property and chemical resi...
2016,
28: 064125.
doi: 10.11884/HPLPB201628.064125
Abstract:
The size reference material is used to test and calibrate apparatus, evaluate measure method, and ensure sample values. It is important in industry measurement, controling of products quality and science studying. In the present paper, crosslinked po...
The size reference material is used to test and calibrate apparatus, evaluate measure method, and ensure sample values. It is important in industry measurement, controling of products quality and science studying. In the present paper, crosslinked po...
2016,
28: 064126.
doi: 10.11884/HPLPB201628.064126
Abstract:
With the obvious increase of integrating capacity and density in System-in-Package (SIP), it is more and more difficult for traditional cooling methods (e.g., thermal vias through substrate, air cooling) to meet the cooling requirements of high power...
With the obvious increase of integrating capacity and density in System-in-Package (SIP), it is more and more difficult for traditional cooling methods (e.g., thermal vias through substrate, air cooling) to meet the cooling requirements of high power...
2016,
28: 064127.
doi: 10.11884/HPLPB201628.064127
Abstract:
In the last few years, with the rapid development of micro-opto-electro-mechanical-systems(MOEMS), near-infrared(NIR) spectrometers are moving towards low cost, high performance and miniaturization. As a key component of NIR micro-spectrometers, the ...
In the last few years, with the rapid development of micro-opto-electro-mechanical-systems(MOEMS), near-infrared(NIR) spectrometers are moving towards low cost, high performance and miniaturization. As a key component of NIR micro-spectrometers, the ...
2016,
28: 064128.
doi: 10.11884/HPLPB201628.064128
Abstract:
Terahertz (THz) communications are expected to be the next frontier for wireless nanonetworks. Nanonetworks are formed by nanodevices (tiny devices at the nanoscale or molecular scale). The high transmittable data rate for nanonetwork is investigated...
Terahertz (THz) communications are expected to be the next frontier for wireless nanonetworks. Nanonetworks are formed by nanodevices (tiny devices at the nanoscale or molecular scale). The high transmittable data rate for nanonetwork is investigated...
2016,
28: 064129.
doi: 10.11884/HPLPB201628.064129
Abstract:
Combined with the quality giant magnetostrictive material (GMM), a GMM transducer with bow type structure is proposed based on the triangle amplification principle. The purpose is to improve the actuation stroke of the transducer for bigger sound int...
Combined with the quality giant magnetostrictive material (GMM), a GMM transducer with bow type structure is proposed based on the triangle amplification principle. The purpose is to improve the actuation stroke of the transducer for bigger sound int...
2016,
28: 064130.
doi: 10.11884/HPLPB201628.064130
Abstract:
Resonant pressure micro sensors with differential design can achieve high linearity and sensitivity, and reduce the temperature drift. However, the reported differential resonant pressure micro sensors suffer from sensitivity mismatch among two reson...
Resonant pressure micro sensors with differential design can achieve high linearity and sensitivity, and reduce the temperature drift. However, the reported differential resonant pressure micro sensors suffer from sensitivity mismatch among two reson...
2016,
28: 064131.
doi: 10.11884/HPLPB201628.064131
Abstract:
stopper can be used for shock protection, however, traditional stopper may generate secondary shock which could result in fracture, debris, and performance shifts of the device. The problem can be efficiently solved by introducing elastic stopper, bu...
stopper can be used for shock protection, however, traditional stopper may generate secondary shock which could result in fracture, debris, and performance shifts of the device. The problem can be efficiently solved by introducing elastic stopper, bu...
2016,
28: 064132.
doi: 10.11884/HPLPB201628.064132
Abstract:
Total phosphorous (TP) is one of the important indicators of water pollution and eutrophication, and the detection of total phosphorus is of important significance. Many digestion methods have been used for the detection of TP. TiO2/UV photocatalytic...
Total phosphorous (TP) is one of the important indicators of water pollution and eutrophication, and the detection of total phosphorus is of important significance. Many digestion methods have been used for the detection of TP. TiO2/UV photocatalytic...
2016,
28: 064133.
doi: 10.11884/HPLPB201628.064133
Abstract:
The thin film bulk acoustic resonator (FBAR) performance model contains two relationships: one is the relationship between the effective electromechanical coupling coefficient and the shape factor (ratio of area and perimeter) of FBAR, the other is t...
The thin film bulk acoustic resonator (FBAR) performance model contains two relationships: one is the relationship between the effective electromechanical coupling coefficient and the shape factor (ratio of area and perimeter) of FBAR, the other is t...
2016,
28: 064134.
doi: 10.11884/HPLPB201628.064134
Abstract:
The effect of ultraviolet irradiation on the dielectric properties of polyetherimide (PEI) film samples was investigated. FT-IR and SEM were used to characterize the molecular structure and the surface morphology of the untreated and treated PEI film...
The effect of ultraviolet irradiation on the dielectric properties of polyetherimide (PEI) film samples was investigated. FT-IR and SEM were used to characterize the molecular structure and the surface morphology of the untreated and treated PEI film...
2016,
28: 064112.
doi: 10.11884/HPLPB201628.064112
Abstract:
This paper presents an energy harvester which operates at less than 1 kHz and consists of a micro siliconlead zirconate titanate (Si-PZT) cantilever and a nickel mass block on the cantilever. The energy harvester is a device that can convert the amb...
This paper presents an energy harvester which operates at less than 1 kHz and consists of a micro siliconlead zirconate titanate (Si-PZT) cantilever and a nickel mass block on the cantilever. The energy harvester is a device that can convert the amb...
